SnO2薄膜的制备及其光电特性

doi:10.3969/j.issn.1000-1565.2017.02.003

河北大学学报(自然科学版) ›› 2017, Vol. 37 ›› Issue (2): 123-127.DOI: 10.3969/j.issn.1000-1565.2017.02.003

SnO₂薄膜的制备及其光电特性

刘绰¹,马蕾^1,2,彭英才¹

收稿日期:2016-09-18 出版日期:2017-03-25 发布日期:2017-03-25
通讯作者: 马蕾(1978—),男,河北保定人,河北大学副教授,博士,主要从事微纳薄膜材料与器件的研究.E-mail:malei@hbu.edu.cn
作者简介:刘绰(1990—),男,河北辛集人,河北大学在读硕士研究生. E-mail:410857241@qq.com
基金资助:
国家自然科学基金青年基金资助项目(61306098)

Preparation of SnO₂ thin film and photoelectric properties

LIU Chuo¹,MA Lei^1,2,PENG Yingcai¹

1.College of Electronic and Informational Engineering, Hebei University, Baoding 071002, China; 2.Key Laboratory of Digital Medical Engineering of Hebei Province, Hebei University, Baoding 071002, China

Received:2016-09-18 Online:2017-03-25 Published:2017-03-25

摘要/Abstract

摘要： 以高纯Sn丝为蒸发源,采用真空热蒸发法在石英衬底上沉积了厚度为205 nm的金属Sn薄膜.随后,在高纯氧氛围中于200~500 ℃条件下进行氧化处理.利用X线衍射仪、拉曼光谱仪、分光光度计和数字源表测量了不同氧化温度下样品的结构、光学、电学特性.结构测量表明,不同氧化温度会产生不同结晶状态的氧化产物,提高氧化温度可得到单一、稳定的四方晶系SnO₂.光学测量结果证实,随氧化温度的升高,薄膜样品的光学带隙增大,电流-电压测试表明薄膜电阻率随氧化温度的升高而降低.

关键词: 真空热蒸发, Sn薄膜, SnO₂, 氧化处理

Abstract: Sn thin films with thickness of 205 nm were deposited on quartz substrates surface by vacuum thermal evaporation method using high purity Sn wire as evaporation source.Then,the films were under oxidation treatment in the temperature range of 200~500 °C in high purity oxygen atmosphere.The films were characterized using X-ray diffraction(XRD),Raman spectrometer,spectrophotometer and source meter for their structural,optical and electrical properties respectively.The measure for structural studies reveal that SnO₂ of tetragonal system with a single crystal orientation is obtained under the high temperature.The optical measurement shows that thin film optical band gap in creases with oxidation temperature rises.The current–voltage characteristics show that electrical conductivity decrease with increasing oxidation treatment.

Key words: vacuum evaporation, Sn thin film, SnO₂, oxidation treatmen

中图分类号:

TG156.21

刘绰,马蕾,彭英才. SnO₂薄膜的制备及其光电特性[J]. 河北大学学报(自然科学版), 2017, 37(2): 123-127.

LIU Chuo,MA Lei,PENG Yingcai. Preparation of SnO₂ thin film and photoelectric properties[J]. Journal of Hebei University (Natural Science Edition), 2017, 37(2): 123-127.

参考文献

[1] 张谢群,余家国,赵修建,等.二氧化锡薄膜的制备和应用研究进展[J].化学试剂,2003,25(4):203-206.DOI:10.13822/j.cnki.hxsj.2003.04.005. ZHANG X Q,YU J G,ZHAO X J,et al.Research development on preparation and application of SnO₂ thin films[J].Chemical Reagents,2003,25(4):203-206.
[2] 陆凡,陈诵英.二氧化锡在气敏材料中的应用[J].石油化工,1994,23(9):617-624. CHEN F,CHEN S Y.Tin SnO₂ in the application of gas sensitive materials[J].Petrochemical Technology,1994,23(9):617-624.
[3] 严辉,马黎君,陈光华,等.金属Sn薄膜的高温氧化与表面特征[J].物理学报,1997,46(8):1658-1664. YAN H,MA L J,CHEN G H,et al.Oxidation at enhanced temperatures and surface characterization of metal Sn thin films[J].Acta Physica Sinica,1997,46(8):1658-1664.
[4] BHARDWAJ N,PANDEY A,MOHAPATRA S.Effects of MeV heavy ion irradiation on structural,morphological and optical properties of nanostructured SnO₂ thin films prepared by thermal evaporation[J].Journal of Alloys and Compounds,2016,656:647-653.DOI:10.1016/j.jallcom.2015.09.275.
[5] MOREP S,KHOLLAM Y B,DESHPANDES B,et al.High-performance temperature-selective SnO₂:Cu-based sensor[J].Mater Lett,2003,57(15):2177-2184.DOI:10.1016/S0167-577X(02)01170-9.
[6] CHEN Y X,CAMPBELL L J,ZHOUWL.Self-catalytic branch growth of SnO₂ nanowire junctions[J].Journal of Crystal Growth,2004,270:505-511.DOI:10.1016/j.jcrysgro.2004.07.011.
[7] DAIZ R,PANZ W,WANGZL.Novel nanostructures of functional oxides synthesized by thermal evaporation[J].AdvFunct Mater,2003,13(1):9-24.DOI:10.1002/adfm.200390013.
[8] NI J,ZHAO X,ZHENG X,et al.Electrical,structural,photoluminescence and optical properties of p-type conducting,antimony-doped SnO₂ thin films[J].ActaMaterialia,2009,57:278-285.DOI:10.1016/j.actamat.2008.09.013.
[9] BANERJEE M,ROY S.Palladium(0)catalyzed regioselective carbonylpropargylation across tetragonal tin(Ⅱ)oxide via redox transmetallation[J].ChemInform,2003,21(4):534-535.DOI:10.1002/chin.200325068.
[10] VIJAYARANGAMUTHU K,SHYAMA R.Nanoparticle size,oxidation state,and sensing response of tin oxide nanopowders using Raman spectroscopy[J].Journal of Alloys and Compounds,2014,610(15):706-731.DOI:10.1016/j.jallcom.2014.04.187.
[11] HOAN D,NGUYEN V Q,LI W,et al.One-Dimensional tin-oxide-coated single-wall carbon nanotubes for gas sensor applications[J].Journal of the Korean Physical Society,2009,54(5):893-1901.DOI:10.3938/jkps.54.1893.
[12] LUO S H,WAN Q,LIU W L,et al.Photoluminescence properties of SnO₂nanowhiskers grown by thermal evaporation[J].Progress in solid state chemistry,2005,33:287-292.DOI:10.1016/j.progsolidstchem.2005.11.008.
[13] AMUTHA A,AMIRTHAPANDIAN S,SUNDARAVEL B,et al.Structural and gas sensing properties of ex-situ oxidized Sn grown by thermal evaporation[J].Applied Surface Science,2016,360:731-737.DOI:10.1016/j.apsusc.2015.11.054.

SnO₂薄膜的制备及其光电特性

Preparation of SnO₂ thin film and photoelectric properties

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