采用等离子体增强化学气相沉积技术和旋涂法相结合制备了纳米硅/P3HT复合薄膜.利用Raman散射、紫外-可见吸收光谱(UV-Vis)和光致发光谱(PL)等技术对复合薄膜的微观结构及光学特性进行了分析.结果表明:氢流量的增加,可以有效钝化硅中的缺陷,提高纳米硅薄膜的晶化度；复合薄膜中纳米硅的引入改善了P3HT在短波长范围的吸收能力,但存在与P3HT辐射发光相竞争的过程；对复合薄膜的光致发光机制进行了分析.
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