为提高大气压下微波等离子体分解CF4过程的能量效率,降低副产物NOx的生成,采用微波等离子体后端添加Ag/Al2O3催化剂的方法,研究了微波等离子体与催化剂协同作用对CF4去除率的影响,考察了催化剂载体中银负载量对副产物NOx生成的抑制效果.结果表明,微波等离子体与Ag/Al2O3对CF4去除协同作用明显,CF4最高去除率达到95.8%.等离子体与催化剂的协同作用使CF4去除效率提高了32.7%,与单独等离子体作用相比,能量利用效率提高58.1%.催化剂中负载Ag量对副产物NOx的体积分数有明显影响,当Ag的负载量为Al2O3质量的2%时,NOx产生量减少了90%.
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