Si纳米线的制备方法与器件应用

  • 彭英才 ,
  • 范志东 ,
  • 白振华
展开
  • 河北大学,电子信息工程学院,河北,保定,071002

网络出版日期: 2009-01-25

基金资助

河北省自然科学基金

Fabrication and Device Application of Si Nanowires

  • PENG Ying-cai ,
  • FAN Zhi-dong ,
  • BAI Zhen-hua
Expand

Online published: 2009-01-25

摘要

以气-液-固(VLS)、气-固-固(VSS)、固-液-固(SLS)和氧化物辅助生长(OAG)机制为主线,着重介绍与评论了几种主要的Si纳米线的制备方法,如激光烧蚀沉积(LAD)、化学气相沉积(CVD)、热蒸发和金属(Au,Fe,Ni和Al)催化生长等.简要介绍了Si纳米线及其阵列在场效应晶体管、场发射器件、太阳电池、传感器以及集成电子器件等方面的应用.最后,讨论了各种制备方法的优势与不足,指出了该研究领域今后的发展方向.

本文引用格式

彭英才 , 范志东 , 白振华 . Si纳米线的制备方法与器件应用[J]. 河北大学学报(自然科学版), 2009 , 29(1) : 99 -105 . DOI: 10.3969/j.issn.1000-1565.2009.01.023

参考文献

[1] Yang Y, Tay BK, Sun XW, Fan HM, Shen ZX. Photoluminescence and growth mechanism of amorphous silica nanowires by vapor phase transport [J]. Physica, E. Low-dimensional systems & nanostructures 2006, 2(2).
[2] Robert Juhasz, Kai Kylmaenen, Augustinas Galeckas, Jan Linnros. Size-reduced silicon nanowires: Fabrication and electrical characterization [J]. Materials science & engineering, C. Biomimetic and supramolecular systems 2005, 5/8(5/8).
[3] N. J. Stone, H. Ahmed. Single-electron detector and counter [J]. Applied physics letters 2000, 5(5).
[4] O. H. Elibol, D. Morisette, D. Akin, J. P. Denton, R. Bashir. Integrated nanoscale silicon sensors using top-down fabrication [J]. Applied physics letters 2003, 22(22).
[5] Jong-in Hahm, Charles M. Lieber. Direct Ultrasensitive Electrical Detection of DNA and DNA Sequence Variations Using Nanowire Nanosensors [J]. Nano letters 2004, 1(1).
[6] Nihonyanagi S., Kanemitsu Y.. Efficient indirect-exciton luminescence in silicon nanowires [J]. Physica, E. Low-dimensional systems & nanostructures 2003, 1/4(1/4).
[7] Junjie Niu, Deren Yang, Jian Sha. Infrared spectra of silicon nanowires [J]. Materials Letters 2007, 3(3).
[8] WAGNER R S, ELLIS W C. Vapor-liquid-solid mechanism of single crystal growth [J]. Applied Physics Letters 1964, 4.
[9] GIVARGIZOV E I. Periodic instability in whisker growth [J]. Journal of Crystal Growth 1975, 31.
[10] MORALES A M, LIEBER C MA. laser ablation method for synthesis of crystalline semiconductor nanowires [J]. Science 1998, 279(09).
[11] Fukata N, Oshima T, Okada N, Kizuka T, Tsurui T, Ito S, Murakami K. Phonon confinement in silicon nanowires synthesized by laser ablation [J]. Physica, B. Condensed Matter 2006, 0(0).
[12] J. Albuschies, M. Baus, O. Winkler, B. Hadam, B. Spangenberg, H. Kurz. High-density silicon nanowire growth from self-assembled Au nanoparticles [J]. Microelectronic engineering 2006, 4/9(4/9).
[13] Kwak DW, Cho HY, Yang WC. Dimensional evolution of silicon nanowires synthesized by Au-Si island-catalyzed chemical vapor deposition [J]. Physica, E. Low-dimensional systems & nanostructures 2007, 1/2(1/2).
[14] X.B. Zeng, Y.Y. Xu, S.B. Zhang, Z.H. Hu, H.W. Diao, Y.Q. Wang, G.L. Kong, X.B. Liao. Silicon nanowires grown on a pre-annealed Si substrate [J]. Journal of Crystal Growth 2003, 1/2(1/2).
[15] Feng SQ., Zhang HZ., Bai ZG., Ding Y., Yu DP.. The growth mechanism of silicon nanowires and their quantum confinement effect [J]. Journal of Crystal Growth 2000, 2/3(2/3).
[16] WANG YEWU, SCHMIDT V, SENZ S. Epitaxial growth of silicon nanowires using an aluminium catalyst [J]. Nature Nanotechnology 2006, 1.
[17] Yu DP., Hang QL., Yan HF., Xu J., Xi ZH., Feng SQ., Xing YJ.. Controlled growth of oriented amorphous silicon nanowires via a solid-liquid-solid (SLS) mechanism [J]. Physica, E. Low-dimensional systems & nanostructures 2001, 2(2).
[18] J.B. Chang, J.Z. Liu, P.X. Yan. Ultrafast growth of single-crystalline Si nanowires [J]. Materials Letters 2006, 17/18(17/18).
[19] Hsu JF, Huang BR. The growth of silicon nanowires by electroless plating technique of Ni catalysts on silicon substrate [J]. Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films 2006, 1/2(1/2).
[20] L.Z. Pei, Y.H. Tang, Y.W. Chen, C. Guo, W. Zhang, Y. Zhang. Silicon nanowires grown from silicon monoxide under hydrothermal conditions [J]. Journal of Crystal Growth 2006, 2(2).
[21] Niu JJ, Sha J, Yang DR. Silicon nanowires fabricated by thermal evaporation of silicon monoxide [J]. Physica, E. Low-dimensional systems & nanostructures 2004, 1/2(1/2).
[22] Kyung Ah Jeon, Jong Hoon Kim, Sang Yeol Lee. Simple method for synthesis of silicon nanowire: Pulsed laser deposition in furnace from p-Si wafer target [J]. Progress in Solid State Chemistry 2005, 2/4(2/4).
[23] X.Q. Van, D.F. Liu, L.J. Ci, J.X. Wang, Z.P. Zhou, H.J. Yuan, L. Song, Y. Gao, L.F. Liu, W.Y. Zhou, G. Wang, S.S. Xie. H_2-assisted control growth of Si nanowires [J]. Journal of Crystal Growth 2003, 1/2(1/2).
[24] Gundiah G., Deepak FL., Govindaraj A., Rao CNR.. Carbon-assisted synthesis of silicon nanowires [J]. Chemical Physics Letters 2003, 5-6(5-6).
[25] Niu JJ, Sha J, Yang DR. Sulfide-assisted growth of silicon nano-wires by thermal evaporation of sulfur powders [J]. Physica, E. Low-dimensional systems & nanostructures 2004, 3/4(3/4).
[26] Yi Cui, Zhaohui Zhong, Deli Wang, Wayne U. Wang, Charles M. Lieber. High Performance Silicon Nanowire Field Effect Transistors [J]. Nano letters 2003, 2(2).
[27] FUJIWARA A, INOKAWA H, YAMAZAKI K. Single electron tunneling transistor with tunable barriers using silicon nanowire metal-oxide-semiconductor field-effect transistor [J]. Applied Physics Letters 2006, 88.
[28] TSAKALAKOS L, BALCH J, FRONHEISER J. Silicon nanowire solar cells [J]. Applied Physics Letters 2007, 91.
[29] TALIN A A, HUNTER L L, LéONARD F. Large area, dense silicon nanowire array chemical sensors [J]. Applied Physics Letters 2006, 89.
[30] Chan CK, Peng HL, Liu G, McIlwrath K, Zhang XF, Huggins RA, Cui Y. High-performance lithium battery anodes using silicon nanowires [J]. Nature nanotechnology 2008, 1(1).
文章导航

/

〈 〉