采用螺旋波等离子体辅助射频磁控溅射技术,在蓝宝石(001)衬底上制备不同氮化温度的ZnO薄膜.结果表明,在200~600 ℃内, 不同的氮化温度对薄膜的表面形貌和晶格结构有显著影响.
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