采用Monte Carlo模拟方法,对直流电场中甲烷分子的分解过程进行研究,计算出电子在甲烷气体中的漂移速度,结果与实验符合得很好,同时,得到了甲烷分解碎片的空间分布曲线.这些结论对于EACVD合成金刚石薄膜的动力学研究有重要意义.
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