采用蒙特卡罗模拟对氮气直流辉光放电等电子体阴极鞘层区内电子的输运过程进行了研究,计算了阴极鞘层中电子的能量及角分布的空间变化.模拟讨论了电子密度和电子平均能量在鞘层的轴向分布规律.结果表明:在鞘层电子主要以高能束的形式朝前散射,电子在输运过程中表现出的这一特征依赖于放电条件,电子碰撞电离和离解电离产生的次电子在鞘层边界附近迅速倍增.模拟结果为分子气体辉光放电等离子体过程的机理的认识提供了参考依据.
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