用Monte Carlo数值模拟方法研究了辉光等离子体辅助化学气相沉积法(GPCVD)低温合成金刚石的过程中,电子在H2/CH4混合气体中的运动.本文在数值模拟中,采用非匀强电场,并考虑了电子的雪崩过程,实现了对须跟踪的粒子数不断增长的系统的Monte Carlo模拟,给出了电子的能量分布及角分布.
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