采用蒙特卡罗方法,模拟了脉冲激光烧蚀制备纳米硅晶粒的动力学过程.在模拟中采用了成核长大模型,对室温下的硅晶粒成核过程中稳定晶核所含硅原子数目进行了研究.经过大量的计算以及与实验数据的比较,发现当稳定晶核所含硅原子数目为6时,计算得出的纳米硅晶粒平均尺寸分布规律与实验数据符合较好.
The dynamical process of silicon nanoparticles prepared by pulsed-laser deposition was simulated using Monte Carlo simulation method.In the simulation,the nucleation and growth model was adopted and the number of silicon atoms contained in the stable nucleus were studied during nanoparticles formation at room temperature.After extensive calculations and comparisons with the experimental data,it was found that the average size distribution of silicon nanoparticles was in good agreement with the experimental data when the number of silicon atoms in the stable nucleus was 6.
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