阐述了一种使用周边固定的圆形膜片的反射式强度调制型MEMS光纤压力传感器的工作原理,在现有外界压力下的膜片应力、应变及固有频率公式的基础上,推导了膜片应力、应变和固有频率三者随传感器尺度变化的一般规律.利用有限元分析软件ANSYS对推演出的规律仿真模拟和分析,验证了此规律的正确性和普适性,同时修正分析模型,总结了理论公式与实际应用之间的联系与区别.
The working principle of a reflective intensity modulated MEMS fiber pressure sensor is described using circular thin film with fixed circumference.Based on the existing formulas of membrane stress,strain and natural frequency under external pressure,a general law of the change of the diaphragm with the sensor scale is derived.The simulation and analysis of the deduced law by using the finite element analysis software ANSYS verify the correctness and universality of the law.At the same time,the analysis model is revised,and the relation and difference between theoretical formula and practical application are summarized.
[1] LIU C.微机电系统基础[M].黄庆安译.北京: 机械工业出版社,2013: 8-16,63-68,381-382.
[2] 苑伟政,乔大勇.微机电系统[M].西安: 西北工业大学出版社,2011.
[3] 杨国光.微光学与系统[M].杭州: 浙江大学出版社,2008: 1-3.
[4] 李川.光纤传感器技术[M].北京: 科学出版社,2012: 274-275.
[5] ELOY J C,MOUNIER E.Status of the MEMS industry[C] // MEMS/MOEMS Components and Their Applications II.Bellingham,WA,USA: SPIE,2004: 43-49.DOI: 10.1117/12.594011.
[6] SAKATA H,IWAZAKI T.Sensitivity-variable fiber optic pressure sensors using microbend fiber gratings[J].Optics Communications,2009,282(23): 4532-4536.DOI:10.1016/j.optcom.2009.08.040.
[7] BENHAM P P,CRAWFOR D,ARMSTRONG C G.工程材料力学[M].第2版.北京:世界图书出版公司,2000: 112-171.
[8] PARK S J,DOLL J C,PRUITT B L.Piezoresistive cantilever performance, part I: Analytical model for sensitivity[J].Journal of Microelectromechanical Systems,2010,19(1): 137-148.DOI:10.1109/jmems.2009.2036581.
[9] PARK S J,DOLL J C,RASTEGAR A J,et al.Piezoresistive cantilever performance, part II: optimization[J].Journal of Microelectromechanical Systems,2010,19(1): 149-161.DOI:10.1109/jmems.2009.2036582.
[10] (美)盖德.微机电系统基础[M].赵永梅,段瑞飞,季安,译.北京:机械工业出版社,2017:6-13.
[11] SCHOTT A G.Schott Borofloat 33 glass [EB/OL].[2019-03-16].https://www.schott.com/borofloat/chinese/index.html?com-origin=zh-CN.
