RF磁控溅射沉积压强对InGaZnO4薄膜特性的影响
闫小兵,史守山,娄建忠,郑树凯,曹智
Influence of deposition pressure on optical and electrical properties of IGZO films fabricated by radio frequency magnetron sputtering
YAN Xiaobing,SHI Shoushan,LOU Jianzhong,ZHENG Shukai,CAO Zhi
河北大学学报(自然科学版)
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2015, (3): 243
-246,252
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DOI: 10.3969/j.issn.1000-1565.2015.03.004
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