氩环境气压对激光烧蚀沉积纳米硅薄膜形貌的影响
闫常瑜,周阳,褚立志,武德起,王晓菲,王英龙
Influence of Ambient Gas Pressure on Morphology of nc-Si Film Deposited by Pulsed Laser Ablation in Argon
YAN Chang-yu,ZHOU Yang,CHU Li-zhi,WU De-qi,WANG Xiao-fei,WANG Ying-long
河北大学学报(自然科学版)
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2005, (1): 29
-32
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DOI: 10.3969/j.issn.1000-1565.2005.01.008
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