铜膜制备过程中辉光等离子体的双探针诊断
高艳芬,郝忠秀,温梦仙,乔晓东,刘保亭,赵庆勋
Diagnostic of Glow Plasma in Preparing the Cooper Film Process by Using Double Langmuir Probes
GAO Yan-fen,HAO Zhong-xiu,WEN Meng-xian,QIAO Xiao-dong,LIU Bao-ting,ZHAO Qing-xun
河北大学学报(自然科学版)
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2008, (3): 252
-257
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DOI: 10.3969/j.issn.1000-1565.2008.03.009
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