激光退火能量对非晶Si薄膜晶化的影响

邓泽超,马娜,褚立志,王英龙

Influence of Annealed Laser Energy on Crystallization of Amorphous Si Thin Films

DENG Ze-chao,MA Na,CHU Li-zhi,WANG Ying-long

河北大学学报(自然科学版) . 2008, (6): 592 -595 . DOI: 10.3969/j.issn.1000-1565.2008.06.009