具有粗糙表面的氮化硅薄膜光热偏折谱分析
丁文革,张江勇,马立彬,于威,傅广生
Analysis of Photothermal Deflection Spectroscopy of SiNx Thin Films with Rough Surface
DING Wen-ge,ZHANG Jiang-yong,MA Li-bin,YU Wei,FU Guang-sheng
河北大学学报(自然科学版)
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2006, (4): 362
-365,372
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DOI: 10.3969/j.issn.1000-1565.2006.04.008
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