EACVD中基片表面电子及氢原子能量分布
董丽芳,张玉红,陈俊英
Energy Distribution of Electrons and H Atoms on the Surface of the Substrate during Electron Assisted Chemical Vapor Deposition of Diamond
DONG Li-fang,ZHANG Yu-hong,CHEN Jun-ying
河北大学学报(自然科学版)
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2001, (1): 34
-37
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DOI: 10.3969/j.issn.1000-1565.2001.01.008
