MEMS光纤压力传感器压力膜片的仿真与分析

祝彦,潘亚涛,刘光辉,李小亭

Simulation and analysis of pressure membrane of MEMS fiber optic pressure sensor

ZHU Yan,PAN Yatao,LIU Guanghui,LI Xiaoting

河北大学学报(自然科学版) . 2020, (2): 132 -136 . DOI: 10.3969/j.issn.1000-1565.2020.02.004