Physical and Electrical Properties of ZrO2 Gate Dielectrics Film

doi:10.3969/j.issn.1000-1565.2009.05.010

Abstract

CLC Number:

TN304.2+1 O484

WU De-qi,YAO Jin-cheng,ZHAO Hong-sheng,CHANG Ai-min,LI Feng,ZHOU Yang. Physical and Electrical Properties of ZrO2 Gate Dielectrics Film[J]. Journal of Hebei University (Natural Science Edition), 2009, 29(5): 484-488,554.

References

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