SUN Bing
,
ZHANG Lian-zheng
,
ZHU Xiao-mei
,
CAI Si-meng
. Synergy for CF4 Decomposition Mechanism by Plasma and Ag/ Al2O3 Catalyst[J]. Journal of Hebei University(Natural Science Edition), 2010
, 30(5)
: 525
-529
.
DOI: 10.3969/j.issn.1000-1565.2010.05.018
[1] 解宏端, 朱小梅, 孙冰, XIE Hong-duan, ZHU Xiao-mei, SUN Bing. 微波等离子体处理PFCS的研究 [J]. 河北大学学报(自然科学版) 2007.doi:10.3969/j.issn.1000-1565.2007.z1.026
[2] MOHINDRA V, CHASE H, SAWIN H H. Abatement of perfluorocompounds(PFCs)in a microwave tubular reactor using O2 as an additive gas [J]. IEEE Transactions on Plasma Science 1997.
[3] Hannus Istvan. Adsorption and transformation of halogenated hydrocarbons over zeolites [J]. Applied Catalysis, A. General: An International Journal Devoted to Catalytic Science and Its Applications 1999, 2(2).
[4] KIM Y, KIM K T, CHA M S. CF4 decomposition using streamer-and glow-mode in dielectric barrier discharges [J]. IEEE Transactions on Plasma Sciences 2005, 33(03).
[5] FERREIRA N G, CORAT E J, TRAVZ-AIROLDI V J. Gas phase study with CF4 and CCl2F2 addition in microwave CVD diamond growth [J]. Diamond and Related Materials 1998, 7(2-5).
[6] Lee, HM, Chang, MB, Lu, RF. Abatement of perfluorocompounds by tandem packed-bed plasmas for semiconductor manufacturing processes [J]. Industrial & Engineering Chemistry Research 2005, 15(15).
[7] CHANG M B, LEE H M. Abatement of perfluorocarbons with combined plasma catalysis in atmospheric pressure nvironment [J]. Catalysis Today 2004, 89(1/2).
[8] 王文兴. 工业催化 [M]. 北京:化学工业出版社 1978.