GAO Yan-fen , HAO Zhong-xiu , WEN Meng-xian , QIAO Xiao-dong , LIU Bao-ting , ZHAO Qing-xun . Diagnostic of Glow Plasma in Preparing the Cooper Film Process by Using Double Langmuir Probes[J]. Journal of Hebei University(Natural Science Edition), 2008 , 28(3) : 252 -257 . DOI: 10.3969/j.issn.1000-1565.2008.03.009

[1] Dongwen Gan, Paul S. Ho, Rui Huang, Jihperng Leu, Jose Maiz, Tracey Scherban. Isothermal stress relaxation in electroplated Cu films. I. Mass transport measurements [J]. Journal of Applied Physics 2005, 10(10).
[2] Karabacak T, DeLuca JS, Wang PI, Ten Eyck GA, Ye D, Wang GC, Lu TM. Low temperature melting of copper nanorod arrays [J]. Journal of Applied Physics 2006, 6(6).
[3] Xin-Ping Qu, Jing-Jing Tan, Mi Zhou, Tao Chen, Qi Xie, Guo-Ping Ru, Bing-Zong Li. Improved barrier properties of ultrathin Ru film with TaN interlayer for copper metallization [J]. Applied physics letters 2006, 15(15).
[4] Yan MY, Suh JO, Ren F, Tu KN, Vairagar AV, Mhaisalkar SG, Krishnamoorthy A. Effect of Cu3Sn coatings on electromigration lifetime improvement of Cu dual-damascene interconnects [J]. Applied physics letters 2005, 21(21).
[5] LIU B T, CHENG C S, LI F. Ni-Al diffusion barrier layer for integrating ferroelectrie capacitors on Si [J]. Applied Physics Letters 2006, 88(25).
[6] B. T. Liu, K. Maki, S. Aggarwal, B. Nagaraj, V. Nagarajan, L. Salamanca-Riba, R. Ramesh, A. M. Dhote, O. Auciello. Low-temperature integration of lead-based ferroelectric capacitors on Si with diffusion barrier layer [J]. Applied physics letters 2002, 19(19).
[7] T. Yagisawa, T. Makabe. Modeling of dc magnetron plasma for sputtering: Transport of sputtered copper atoms [J]. Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films 2006, 4(4).
[8] GRIEM H R. Plasma Spectroscopy [M]. New York:McGraw-Hill 1964.
[9] HUDDLESTONE R H, LEONARD S L. Plasma diagnostic techniques [M]. London, UK:Academic Press 1965.
[10] HEALD M A, WHARTON C B. Plasma diagnostic with microwaves [M]. New York:wiley 1965.
[11] SANDEN M C M V D, REGT J M D, JANSSEN G M. A combined Thomson-Rayleigh scattering diagnostic using an intensified photodiode array [J]. Review of Scientific Instruments 1992, 63(06).
[12] Cameron S.M., Tracy M.D.. Electron density and temperature contour plots from a laser-produced plasma using collective ultraviolet Thomson scattering [J]. IEEE Transactions on Plasma Science 1996, 1(1).
[13] JOHNSON E O, MALTER L. A floating double probe method for measurements in gas discharges [J]. Physical Review 1950, 80(01).
[14] Ismail L.Z., El-Magd A.A.. Pressure dependence of the electrical potential and electron temperature in a microwave-generated plasma [J]. IEEE Transactions on Plasma Science 1992, 2(2).
[15] Hendron JM., Morrow T., Graham WG., Mahony CMO.. LANGMUIR PROBE MEASUREMENTS OF PLASMA PARAMETERS IN THE LATE STAGES OF A LASER ABLATED PLUME [J]. Journal of Applied Physics 1997, 5(5).
[16] Nisha M, Saji KJ, Ajimsha RS, Joshy NV, Jayaraj MK. Characterization of radio frequency plasma using Langmuir probe and optical emission spectroscopy [J]. Journal of Applied Physics 2006, 3(3).