Journal of Hebei University(Natural Science Edition) >

2006 , Vol. 26 >Issue 4: 362 - 365,372

DOI: https://doi.org/10.3969/j.issn.1000-1565.2006.04.008

Analysis of Photothermal Deflection Spectroscopy of SiNx Thin Films with Rough Surface

  • DING Wen-ge ,
  • ZHANG Jiang-yong ,
  • MA Li-bin ,
  • YU Wei ,
  • FU Guang-sheng
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Online published: 2006-07-25

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DING Wen-ge , ZHANG Jiang-yong , MA Li-bin , YU Wei , FU Guang-sheng . Analysis of Photothermal Deflection Spectroscopy of SiNx Thin Films with Rough Surface[J]. Journal of Hebei University(Natural Science Edition), 2006 , 26(4) : 362 -365,372 . DOI: 10.3969/j.issn.1000-1565.2006.04.008

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