La0.67Sr0.33MnO3(LSMO)/PbZr0.4Ti0.6O3(PZT)/LSMO heterostructure was prepared on SrTiO3(STO)substrate, in which LSMO films were prepared by pulsed laser deposition and PZT film was prepared by Sol-Gel method. The LSMO/PZT/LSMO heterostructure was characterized in terms of its structural and physical properties. X-ray diffraction(XRD)analysis established that both LSMO and PZT were grown epitaxially on STO substrate. The LSMO/PZT/LSMO capacitor possessed very good ferroelectric hysteresis property and its remnent polarization and coercive voltage of the LSMO/PZT/LSMO capacitor, measured at 5 V, were 26.9 μC/cm2 and 2.5 V, respectively. The LSMO/PZT/LSMO capacitor exhibited very good fatigue resistant property. The leakage current density of the capacitor measured at 5 V was 7.4×10-6 A/cm2, and it met the ohmic conduction mechanism below 2.9 V, and space charge limited current(SCLC)conduction from 2.9 V to 5 V.- DOI:10.3969/j.issn.1000-1565.2022.04.005La0.67Sr0.33MnO3/PbZr0.4Ti0.6O3/La0.67Sr0.33MnO3外延铁电电容器物理性能薛迎港1,孟浩1,王照文1,赵文泽2,刘保亭1,代秀红1(1.河北大学 物理科学与技术学院,河北 保定 071002;2.河北大学 电子信息工程学院,河北 保定 071002)摘 要:采用脉冲激光沉积法制备La0.67Sr0.33MnO3(LSMO)薄膜,溶胶-凝胶法制备PbZr0.4Ti0.6O3(PZT)薄膜,在SrTiO3(STO)基片上制备了LSMO/PZT/LSMO异质结电容器.X线衍射(XRD)研究表明LSMO和PZT薄膜在STO基片上实现了外延生长.LSMO/PZT/LSMO电容器具有良好的铁电性能,在5 V测试电压下,剩余极化强度为26.9 μC/cm2,矫顽电压为2.5 V,LSMO/PZT/LSMO电容器显示出了良好的抗疲劳性能.5 V电压下电容器的漏电流密度为7.4×10-6 A/cm2,在0~2.9 V为欧姆导电机制,2.9~5 V满足空间电荷限制电流(SCLC)导电机制. 关键词:铁电电容器;锆钛酸铅;镧锶锰氧;脉冲激光沉积法;溶胶-凝胶法;漏电机理中图分类号:O469 文献标志码:A 文章编号:1000-1565(2022)04-0364-06Physical properties of La0.67Sr0.33MnO3/PbZr0.4Ti0.6O3/La0.67Sr0.33MnO3 epitaxial ferroelectric capacitorXUE Yinggang1,MENG Hao1,WANG Zhaowen1,ZHAO Wenze2,LIU Baoting1,DAI Xiuhong1(1. College of Physics Science and Technology, Hebei University, Baoding 071002, China;2. College of Electronic and Information Engineering, Hebei University, Baoding 071002, China)Abstract: La0.67Sr0.33MnO3(LSMO)/PbZr0.4Ti0.6O3(PZT)/LSMO heterostructure was prepared on SrTiO3(STO)substrate, in which LSMO films were prepared by pulsed laser deposition and PZT film was prepared by Sol-Gel method. The LSMO/PZT/LSMO heterostructure was characterized in terms of its structural and physical properties. X-ray diffraction(XRD)analysis established that both LSMO and PZT were grown epitaxially on STO substrate. The LSMO/PZT/LSMO capacitor possessed very good ferroelectric hysteresis property and its remnent polarization and coercive voltage of the LSMO/PZT/LSMO capacitor, measured at 5 V, were 26.9 μC/cm2 and 2.5 V, respectively. The LSMO/PZT/LSMO capacitor exhibited very good fatigue resistant property. The leakage current density of the capacitor measured at 5 V was 7.4×10-6 A/cm2, and it met the ohmic conduction mechanism below 2.9 V, and space charge limited current(SCLC)conduction from 2.9 V to 5 V.- 收稿日期:2021-08-31 基金项目:国家自然科学基金资助项目(11374086);河北省自然科学基金资助项目(E2014201188;A2018201168) 第一作者:薛迎港(1997—),男,河北石家庄人,河北大学在读硕士研究生,主要从事铁电薄膜及器件方向研究.E-mail:yinggang_xue@hotmail.com 通信作者:代秀红(1978—)女,河北定州人,河北大学副教授,主要从事钙钛矿结构超导、铁电、介电等氧化物薄膜及器件方向研究.E-mail:daixiuhong@hbu.edu.cn第4期薛迎港等:La0.67Sr0.33MnO3/PbZr0.4Ti0.6O3/La0.67Sr0.33MnO3外延铁电电容器物理性能
XUE Yinggang
,
MENG Hao
,
WANG Zhaowen
,
ZHAO Wenze
,
LIU Baoting
,
DAI Xiuhong
. Physical properties of La0.67Sr0.33MnO3/PbZr0.4Ti0.6O3/La0.67Sr0.33 MnO3 epitaxial ferroelectric capacitor[J]. Journal of Hebei University(Natural Science Edition), 2022
, 42(4)
: 364
-369
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DOI: 10.3969/j.issn.1000-1565.2022.04.005
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