In the dielectric barrier discharge(DBD), changes in the working gas lead to corresponding variations in the optical and electrical characteristics of the plasma. This study systematically investigates the effects of Ar gas and He-Ar gas mixture on the optical and electrical characteristics of plasma using an atmospheric-pressure needle-plate DBD device. Experimental results indicate that when the Ar gas is used as the working gas, the needle-plate DBD exhibits higher discharge intensities and brighter discharge images.- 引用格式:张文恺,杨术明,马永龙,等.基于EDEM的牧场推料机器人参数优化设计与试验［J］.河北大学学报(自然科学版),2026,46(3):225-236.引用格式:侯佳讯,樊智慧,单瑞康,等.氩/氦氩混合气体对大气压针-板DBD光电特性的影响［J］.河北大学学报(自然科学版),2026,46(3):271-277.DOI:10.3969/j.issn.1000-1565.2026.03.005氩/氦氩混合气体对大气压针-板DBD光电特性的影响侯佳讯,樊智慧,单瑞康,王伟伟,刘峰(河北工程大学 数理科学与工程学院,河北省计算光学成像与光电检测技术创新中心,河北省计算光学成像与智能感测国际联合研究中心,河北 邯郸 056038)摘 要:在介质阻挡放电(dielectric barrier discharge, DBD)中,工作气体改变会导致放电产生的等离子体光电特性随之变化.本文采用大气压针-板DBD装置,系统研究了氩气和氦氩混合气体对等离子体光电特性的影响.实验结果表明:当采用氩气作为工作气体时,针-板DBD表现出更高的放电强度,放电通道的发光强度更高.在相同外加电压下,氩气条件下的放电峰值电流显著高于氦氩混合气体条件下的放电峰值电流.同时,氩气放电的外加功率和分子转动温度均略高于混合气体,因而更适用于刻蚀等有高能放电需求的工业应用.相比之下,在氦氩混合气体条件下,放电形态更为均匀,分子振动温度较高,而分子转动温度相对较低,表明其更适合于材料表面改性等对温度敏感的工业应用.关键词:介质阻挡放电;外加功率;分子振动温度;分子转动温度中图分类号:O461.2;O433.4 文献标志码:A 文章编号:1000-1565(2026)03-0271-07DOI:10.3969/j.issn.1000-1565.2026.03.005Effect of Ar gas and He-Ar gas mixture on the optical and electrical characteristics of a needle-plate DBD at atmospheric pressureHOU Jiaxun, FAN Zhihui, SHAN Ruikang, WANG Weiwei, LIU Feng(Hebei Computational Optical Imaging and Photoelectric Detection Technology Innovation Center, Hebei International Joint Research Center for Computational Optical Imaging and Intelligent Sensing, School of Mathematics and Physics, Hebei University of Engineering, Handan 056038, China)Abstract: In the dielectric barrier discharge(DBD), changes in the working gas lead to corresponding variations in the optical and electrical characteristics of the plasma. This study systematically investigates the effects of Ar gas and He-Ar gas mixture on the optical and electrical characteristics of plasma using an atmospheric-pressure needle-plate DBD device. Experimental results indicate that when the Ar gas is used as the working gas, the needle-plate DBD exhibits higher discharge intensities and brighter discharge images.- 收稿日期:2025-10-16;修回日期:2025-12-03 基金项目:国家自然科学基金项目(11505045);河北省自然科学基金项目(A2012402002);邯郸市科学技术研究与发展计划项目(21422111227) 第一作者:侯佳讯(2001—),男,河北工程大学在读硕士研究生,主要从事等离子体放电特性方向研究.E-mail:859524939@qq.com 通信作者:王伟伟(1979— ),女,河北工程大学副教授,主要从事等离子体及其应用方向研究. E-mail:wangweiwei@hebeu.edu.cn 第3期侯佳讯等:氩/氦氩混合气体对大气压针-板DBD光电特性的影响河北大学学报(自然科学版) 第46卷At the same applied voltage, the peak current of discharge under the Ar gas condition is significantly higher than that under the He-Ar gas mixture condition. Meanwhile, the applied power and molecular rotational temperature in the Ar gas are slightly higher than those in the He-Ar gas mixture, making it more suitable for industrial applications requiring high-energy discharges, such as etching. In contrast, under the He-Ar gas mixture condition, the discharge exhibits the more uniform morphology, with the higher molecular vibrational temperature and the relatively lower rotational temperature, indicating that this configuration is more appropriate for temperature-sensitive industrial processes, such as material surface modification.
HOU Jiaxun
,
FAN Zhihui
,
SHAN Ruikang
,
WANG Weiwei
,
LIU Feng
. Effect of Ar gas and He-Ar gas mixture on the optical and electrical characteristics of a needle-plate DBD at atmospheric pressure[J]. Journal of Hebei University(Natural Science Edition), 2026
, 46(3)
: 271
-277
.
DOI: 10.3969/j.issn.1000-1565.2026.03.005
[1] Nimbekar A A, Deshmukh R R. Plasma surface modification of flexible substrates to improve grafting for various gas sensing applications: a review[J]. IEEE Trans Plasma Sci, 2022, 50(6): 1382-1394. DOI:10.1109/TPS.2022.3148575.
[2] Hu S H, Yan W W, Yu J M, et al. Degradation of sulfamethoxazole in water by dielectric barrier discharge plasma jet: influencing parameters, degradation pathway, toxicity evaluation[J]. Plasma Sci Technol, 2023, 25(3): 035510. DOI:10.1088/2058-6272/ac9d85.
[3] Jangra R, Ahlawat K, Dixit A, et al. Efficient deactivation of aerosolized pathogens using a dielectric barrier discharge based cold-plasma detergent in environment device for good indoor air quality[J]. Sci Rep, 2023, 13(1): 10295. DOI:10.1038/s41598-023-37014-2.
[4] Koga-ito C Y, Kostov K G, Miranda F S, et al. Cold atmospheric plasma as a therapeutic tool in medicine and dentistry[J]. Plasma Chem Plasma Process, 2024, 44(3): 1393-1429. DOI:10.1007/s11090-023-10380-5.
[5] Barkhade T, Nigam k, Ravi G, et al. Plasma sterilization for bacterial inactivation: studies on probable mechanisms and biochemical actions[J]. Plasma Chem Plasma Process, 2024, 44(1): 429-454. DOI:10.1007/s11090-023-10429-5.
[6] Arifin N M, Mohamad F, Hussin R, et al. Annealing treatment on homogenous n-TiO2/ZnO bilayer thin film deposition as window layer for p-Cu2O-based heterostructure thin film[J]. Coatings, 2023, 13(1): 206. DOI:10.3390/coatings13010206.
[7] Li S J, Yu X, Dang X Q, et al. A novel double dielectric barrier discharge reactor with high field emission and secondary electron emission for toluene abatement[J]. Plasma Sci Technol, 2022, 24(1): 015504. DOI:10.1088/2058-6272/ac17e4.
[8] Huang X J, Sun L Q, Bao Y, et al. An experimental study on discharge mechanism of pulsed atmospheric pressure glow discharges[J]. Phys Plasmas, 2011, 18(3): 033503. DOI:10.1063/1.3566005.
[9] 李雪辰,赵欢欢,贾鹏英,等.常压空气中大间隙介质阻挡放电特性[J].高电压技术, 2013, 39(4): 876-882. DOI: 10.3969/j.issn.1003-6520.2013.04.016.
[10] 李雪辰,张琦,楚婧娣,等.大气压针-板介质阻挡放电丝的时空演化[J].高电压技术, 2017, 43(6): 1880-1886. DOI: 10.13336/j.1003-6520.hve.20170527018.
[11] Barkhordari A, Karimian S, Shahsavari S, et al. Influence of the argon admixture on the reactive oxide species formation inside an atmospheric pressure oxygen plasma jet[J]. Sci Rep, 2024, 14(1): 3425. DOI:10.1038/s41598-024-54111-y.
[12] 邓佳松,赵雪娜,何寿杰.氩气对氦-氩气体中空心阴极放电特性的影响[J].河北大学学报(自然科学版), 2023, 43(3): 257-262. DOI: 10.3969/j.issn.1000 1565.2023.03.005.
[13] Kogelschatz U. Dielectric-barrier discharges: their history, discharge physics, and industrial applications[J]. Plasma Chem Plasma Process, 2003, 23(1): 1-46. DOI:10.1023/A:1022470901385.
[14] 何桐桐,何燕鹏,王遂,等.大气压氦-氩等离子体射流放电特性及活性粒子诊断[J].高电压技术, 2022, 48(10): 4215-4223. DOI: 10.13336/j.1003-6520.hve.20211613.
[15] Fang Z, Qiu Y, Luo Y. Surface modification of polytetrafluoroethylene film using the atmospheric pressure glow discharge in air[J]. J Phys D: Appl Phys, 2003, 36(23): 2980-2985. DOI:10.1088/0022-3727/36/23/019.
[16] Simoncelli E, Schulpen J, Barletta F, et al. UV-VIS optical spectroscopy investigation on the kinetics of long-lived RONS produced by a surface DBD plasma source[J]. Plasma Sources Sci Technol, 2019, 28(9): 095015. DOI:10.1088/1361-6595/ab3c36.
[17] Wang W W, Liu F, Wang X, et al. Optical and electrical characteristics of air dielectric barrier discharges in mode transition at atmospheric pressure[J]. Plasma Sources Sci Technol, 2015, 24(2): 025001. DOI:10.1088/0963-0252/24/2/025001.
[18] Shemansky D E, Broadfoot A L. Excitation of N2 and N+2 systems by electrons: I. absolute transition probabilities[J]. J Quant Spectrosc Radiat Transf, 1971, 11(10): 1385-1400. DOI:10.1016/0022-4073(71)90105-1.
[19] Kramida A, Ralchenko Y, Reader J, et al. NIST Atomic Spectra Database(version 5.12)[DB/OL]. National Institute of Standards and Technology, Gaithersburg, MD [2025-10-14]. https://physics.nist.gov/asd.
[20] Wang W W, Liu F, Wang X, et al. Study on electron temperature in an ablative pulsed plasma thruster by optical emission spectroscopy[J]. EPL Europhys Lett, 2013, 101(5): 55001. DOI:10.1209/0295-5075/101/55001.
[21] Itikawa Y. Cross sections for electron collisions with nitrogen molecules[J]. J Phys Chem Ref Data, 2005, 35(1): 31-53. DOI:10.1063/1.1937426.
[22] Tabata T, Shirai T, Sataka M, et al. Analytic cross sections for electron impact collisions with nitrogen molecules[J]. At Data Nucl Data Tables, 2006, 92(3): 375-406. DOI:10.1016/j.adt.2006.02.002.
[23] 郭浩.大气压双向窄脉冲介质阻挡放电发射光谱研究[D].大连:大连理工大学, 2009.
[24] Yang D Z, Zhou X F, Liang J P, et al. Degradation of methylene blue in liquid using high-voltage pulsed discharge plasma synergizing iron-based catalyst-activated persulfate[J]. J Phys D: Appl Phys, 2021, 54(24): 244002. DOI:10.1088/1361-6463/abecb1.
[25] Hands B A, Arp V D. A correlation of thermal conductivity data for helium[J]. Cryogenics, 1981, 21(12): 697-703. DOI:10.1016/0011-2275(81)90211-3. (
