Diagnostic of Glow Plasma in Preparing the Cooper Film Process by Using Double Langmuir Probes
GAO Yan-fen,HAO Zhong-xiu,WEN Meng-xian,QIAO Xiao-dong,LIU Bao-ting,ZHAO Qing-xun
Journal of Hebei University (Natural Science Edition) . 2008, (3): 252 -257 .  DOI: 10.3969/j.issn.1000-1565.2008.03.009