Progress on the Fabricated Technique of Ultrathin SiOxNy Films
ZHANG Hong,FAN Zhi-dong,TIAN Shu-feng,PENG Ying-cai
Journal of Hebei University (Natural Science Edition) . 2005, (6): 673 -679 .  DOI: 10.3969/j.issn.1000-1565.2005.06.024