Numerical Simulations of Particle Distributions for Sulfur Doped n-type Diamond Thin Film in the Mixture of H2/CH4/H2S/Ar
NAN Jing-yu,ZHAO Qing-xun,QIAO Xiao-dong,YAN Zheng,LIU Bao-ting,ZHANG Jing
Journal of Hebei University (Natural Science Edition) . 2005, (4): 369 -372,398 .  DOI: 10.3969/j.issn.1000-1565.2005.04.008