钛酸铋系铁电薄膜的制备及研究进展

doi:10.3969/j.issn.1000-1565.2006.02.025

摘要/Abstract

摘要： 随着薄膜制备技术以及微电子集成技术的发展,钛酸铋系铁电材料在非易失性铁电随机存储器的应用方面已经展现了极其诱人的发展前景.介绍了无铅钛酸铋系铁电薄膜的研究现状,对目前钛酸铋薄膜最常用的几种主要的制备方法进行了评述,指出了钛酸铋研究中亟待解决的几个问题.

中图分类号:

O469 O484

张未涛,孙宏丽,闫正,张子生,赵庆勋,刘保亭. 钛酸铋系铁电薄膜的制备及研究进展[J]. 河北大学学报(自然科学版), 2006, 26(2): 219-224.

ZHANG Wei-tao,SUN Hong-li,YAN Zheng,ZHANG Zi-sheng,ZHAO Qing-xun,LIU Bao-ting. Preparation and Research Progress of Bismuth Titanate Series Ferroelectric Thin Films[J]. Journal of Hebei University (Natural Science Edition), 2006, 26(2): 219-224.

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