[1] 彭英才, 刘明, 何宇亮, Pen Yingcai, Liu Ming, He Yuliang. PECVD工艺参数对nc-Si:H膜质量的影响 [J]. 稀有金属 1998.doi:10.3969/j.issn.0258-7076.1998.04.009 [2] 薛清, 郁伟中, 黄远明. 利用快速退火法从非晶硅薄膜中生长纳米硅晶粒 [J]. 物理实验 2002.doi:10.3969/j.issn.1005-4642.2002.08.005 [3] 于威, 卢海江, 路万兵, 孟令海, 王新占, 韩理, 傅广生, YU Wei, LU Hai-jiang, LU Wan-bing, MENU Ling-hai, WANG Xin-zhan, HAN Li, FU Guang-sheng. 氢稀释对纳米晶硅薄膜微结构的影响 [J]. 功能材料 2011. [4] 张世斌, 廖显伯, 安龙, 杨富华, 孔光临, 王永谦, 徐艳月, 陈长勇, 刁宏伟. 非晶/微晶过渡区域硅薄膜的微区喇曼散射研究 [J]. 物理学报 2002.doi:10.3321/j.issn:1000-3290.2002.08.030 [5] 何宇亮, 丁建宁, 彭英才, 高晓妮. 对硅薄膜型太阳电池的一些思考 [J]. 2008. [6] BANERJEE A, CHEN E, CLOUGH R. 10.8% efficient one-square-foot-area multifunction amorphous silicon alloy photovoltaic module [A]. Lousiville, USA 1993. [7] Yan BJ, Yue GZ, Owens JM, Yang J, Guha S. Light-induced metastability in hydrogenated nanocrystalline silicon solar cells [J]. Applied physics letters 2004, 11(11). [8] Song DY, Cho EC, Conibeer G, Flynn C, Huang YD, Green MA. Structural, electrical and photovoltaic characterization of Si [J]. Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion 2008, 4(4). [9] Chowdhury A, Mukhopadhyay S, Ray S. Effect of gas flow rates on PECVD-deposited nanocrystalline silicon [J]. Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion 2008, 4(4). [10] Funde AM, Bakr NA, Kamble DK, Hawaldar RR, Amalnerkar DP, Jadkar SR. Influence of hydrogen dilution on structural, electrical and optical properties of hydrogenated nanocrystalline silicon (nc-Si : H) thin films prepared by plasma enhanced chemical vapour deposition (PE-CVD) [J]. Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion 2008, 10(10). [11] 关旭东. 硅集成电路工艺基础 [M]. 北京:北京大学出版社 2005. [12] Dalal VL, Graves J, Leib J. Influence of pressure and ion bombardment on the growth and properties of nanocrystalline silicon materials [J]. Applied physics letters 2004, 8(8). [13] Das D, Bhattacharya K. Characterization of the Si : H network during transformation from amorphous to micro- and nanocrystalline structures [J]. Journal of Applied Physics 2006, 10(10). [14] G. Viera, S. Huet, L. Boufendi. Crystal size and temperature measurements in nanostructured silicon using Raman spectroscopy [J]. Journal of Applied Physics 2001, 8(8). [15] Y. H. Wang, J. Lin, C. H. A. Huan. Structural and optical properties of a-Si:H/nc-Si:H thin films grown from Ar-H_2-SiH_4 mixture by plasma-enhanced chemical vapor deposition [J]. Materials Science & Engineering, B. Solid-State Materials for Advanced Technology 2003, 1/2(1/2). |