关键词: 空心阴极放电, 氧气放电, 数值模拟, 气压和电压

Abstract: In order to explore the effect of discharge parameters on the discharge characteristics of hollow cathode in oxygen, the hollow cathode discharge in oxygen is simulated by using a fluid model. The discharge process contains 11 particles and 48 reactions. The effects of pressure and voltage on discharge characteristics such as electric potential, electric field, average electron energy, and particle density are investigated. The results show that pressure and voltage have important effects on plasma parameters in discharge. With the increase of pressure, the area of the negative glow region expands, the radial electric field in the cathode sheath increases, the peak average electron energy in the cathode sheath decreases, the hollow cathode effect weakens, the peak density of electrons,O⁺₂ ions,active particles O,O₂(a¹Δ_g),O(¹D)increases. The change of three active particles in the negative glow region exhibit different trends of change with pressure. The proportion of electrons in negative particles increases with increasing of pressure. As the voltage increases, the negative glow region gradually separates, the electric field intensity- DOI:10.3969/j.issn.1000-1565.2024.05.003放电参数对氧气空心阴极放电特性的影响管静博,乔音音,赵立芬,何寿杰(河北大学 物理科学与技术学院,河北 保定 071002)摘 要:为了探究放电参数对氧气环境下空心阴极放电特性的影响,本文采用流体模型对氧气环境下的空心阴极放电进行了模拟研究.放电过程中包含11种粒子和48种反应,分析了气压、电压对电势、电场强度、平均电子能量、粒子密度等放电特性的影响.研究表明,气压和电压对放电中的等离子体参量具有重要影响.随着气压的升高,负辉区面积增大,阴极位降区径向电场强度增强,阴极位降区电子平均能量峰值降低,空心阴极效应减弱;电子和O⁺₂离子密度峰值升高,电子在负粒子中所占比重增加;活性粒子O、O₂(a¹Δ_g)和O(¹D)密度峰值升高,负辉区内3种活性粒子随气压变化规律不同.随着电压的升高,阴极所对应负辉区逐渐分离,阴极位降区电场强度和电子能量增长,电子和O⁺₂ 离子密度峰值以及电子在负粒子中所占比重逐步升高,密度峰值逐渐分离,空心阴极效应减弱;放电区间的活性粒子密度升高.结果同时表明电压对空心阴极效应的影响要弱于气压的影响.关键词:空心阴极放电;氧气放电;数值模拟;气压和电压中图分类号:O531 文献标志码:A 文章编号:1000-1565(2024)05-0467-10Effect of discharge parameters on the characteristics of hollow cathode discharge in oxygenGUAN Jingbo, QIAO Yinyin, ZHAO Lifen, HE Shoujie(College of Physics Science and Technology, Hebei University, Baoding 071002, China)Abstract: In order to explore the effect of discharge parameters on the discharge characteristics of hollow cathode in oxygen, the hollow cathode discharge in oxygen is simulated by using a fluid model. The discharge process contains 11 particles and 48 reactions. The effects of pressure and voltage on discharge characteristics such as electric potential, electric field, average electron energy, and particle density are investigated. The results show that pressure and voltage have important effects on plasma parameters in discharge. With the increase of pressure, the area of the negative glow region expands, the radial electric field in the cathode sheath increases, the peak average electron energy in the cathode sheath decreases, the hollow cathode effect weakens, the peak density of electrons,O⁺₂ ions,active particles O,O₂(a¹Δ_g),O(¹D)increases. The change of three active particles in the negative glow region exhibit different trends of change with pressure. The proportion of electrons in negative particles increases with increasing of pressure. As the voltage increases, the negative glow region gradually separates, the electric field intensity- 收稿日期:2023-07-18;修回日期:2023-09-19 基金项目:国家自然科学基金资助项目(U23A20678);河北省自然科学基金资助项目(E2021201037;E2022201057); 河北大学大学生创新创业训练项目(2023122) 第一作者:管静博(1999—),男,河北大学在读硕士研究生,主要从事空心阴极放电方向研究.E-mail:2023244295@qq.com 通信作者:何寿杰(1979—),男,河北大学副教授,博士,主要从事气体放电方向研究.E-mail:heshouj@hbu.edu.cn第5期管静博等:放电参数对氧气空心阴极放电特性的影响河北大学学报(自然科学版) 第44卷and electron energy in the cathode sheath increases. The peak density of electrons and O⁺₂ ions, the proportion of electrons in negative particles gradually increases, the density peak gradually separates, the hollow cathode effect weakens. The active particles also increase with pressure. The results also indicate that the influence of voltage on the hollow cathode effect is weaker than that of pressure.

Key words: hollow cathode discharge, oxygen discharge, numerical simulation, pressure and voltage