不同气压介质阻挡放电中的气体温度

  • 刘为远 ,
  • 董丽芳 ,
  • 张彦召
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  • 河北大学,物理科学与技术学院,河北,保定,071002

网络出版日期: 2010-01-25

基金资助

国家自然科学基金,河北省自然科学基金

Gas Temperature in Dielectric Barrier Discharge at Different Gas Pressures

  • LIU Wei-yuan ,
  • DONG Li-fang ,
  • ZHANG Yan-zhao
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Online published: 2010-01-25

摘要

介质阻挡放电被广泛地应用于材料合成、表面处理和污染控制等领域.为了提高它的应用效率,人们期望测得其各种等离子体参量,如气体温度、电子密度以及电子激发温度等.本实验利用波尔兹曼图解法分析了N_2~+第一负带系(B~2∑_u~+→X~2∑_g~+)的 (0, 0)带的发射谱线, 对介质阻挡放电等离子体的转动温度(气体温度)进行了测量.通过改变实验条件研究了放电气体中氩气含量和气压对等离子体气体温度的影响.结果表明:气体温度随气压的增大而增大,其变化范围是490~550 K,但氩气含量对气体温度的影响不大.

本文引用格式

刘为远 , 董丽芳 , 张彦召 . 不同气压介质阻挡放电中的气体温度[J]. 河北大学学报(自然科学版), 2010 , 30(1) : 23 -25,36 . DOI: 10.3969/j.issn.1000-1565.2010.01.006

Abstract

Dielectric barrier discharge (DBD) is widely used in industrial applications, such as materials synthesis, surface treatments and pollution control. In order to optimize this kind of plasma for industry applications, it is necessary to know the plasma parameters, such as gas temperature, electron density, and electron excited temperature. The emission spectrum of the 1st negative band system of N_2~+(B~2∑_u~+→X~2∑_g~+)(0, 0) has been analyzed by means of diagrammatic view of Boltzmann, and the rotational temperatures (the gas temperatures) of DBD plasma have been measured. The effects of argon contents in discharge gas and gas pressures on gas temperature are studied by changing the experimental conditions. It shows that the gas temperature increases with the increasing gas pressure in the range from 490 K to 550 K, while it is almost independent upon the argon content.

参考文献

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