关键词: 介质阻挡放电, 气体温度, 玻尔兹曼图解

Abstract: Dielectric barrier discharge (DBD) is widely used in industrial applications, such as materials synthesis, surface treatments and pollution control. In order to optimize this kind of plasma for industry applications, it is necessary to know the plasma parameters, such as gas temperature, electron density, and electron excited temperature. The emission spectrum of the 1st negative band system of N_2~+(B~2∑_u~+→X~2∑_g~+)(0, 0) has been analyzed by means of diagrammatic view of Boltzmann, and the rotational temperatures (the gas temperatures) of DBD plasma have been measured. The effects of argon contents in discharge gas and gas pressures on gas temperature are studied by changing the experimental conditions. It shows that the gas temperature increases with the increasing gas pressure in the range from 490 K to 550 K, while it is almost independent upon the argon content.

Key words: dielectric barrier discharge, gas temperature, diagrammatic view of Boltzmann