为了降低薄膜样品表面对激光的反射率,提高等离子体的辐射强度,改善谱线质量,提出了一种在薄膜表面涂覆碳层的方法,并研究了不同涂层厚度对等离子体谱线强度的影响.实验结果表明,薄膜表面涂覆碳层,可有效减少表面对激光束的反射,提高热耦合效率.当碳涂层厚度15 μm左右时热耦合效率最高,激光等离子体的辐射强度明显增强.
[1] 王卓, 杨长红. 铁电薄膜及其应用技术的最新进展 [J]. 新材料产业 2004.doi:10.3969/j.issn.1008-892X.2004.09.016
[2] 冯强, 怀素芳, 张雷, 赵敬伟, 郭庆林, 刘保亭, Feng Qiang, Huai Sufang, Zhang Lei, Zhao Jingwei, Guo Qinlin, Liu Baoting. 激光微区等离子体光谱测定铁电薄膜材料组份的元素比率 [J]. 应用激光 2008.doi:10.3969/j.issn.1000-372X.2008.01.005
[3] 陈金忠, 魏艳红, 郭庆林, Jinzhong CHEN, Yanhong WEI, Qinglin GUO. 金属样品在激光微光源中发射强度的研究 [J]. 光谱学与光谱分析 1999.doi:10.3321/j.issn:1000-0593.1999.05.023
[4] WANG Lipeng. Microelectromechanical system (MEMS) sensors based on lead zirconatetitanate (PZT) films [D]. Philadelphia:Univ of Pennsylvania 2001.
[5] SAFI I. Recent aspects concerning DC magnetron sputtering of thin films:a review [J]. Surface and Coatings Technology 2000, 127.
[6] ARAGON C, AGUILERA J A, PENTALBA F. Improvements in quantitative analysis of steel composition by laser-induced breakdown spectroscopy at atmospheric pressure using an infrared Nd:YAG laser [J]. Applied Spectroscopy 1999, 53(10).
[7] MULTARI R A, FOSTER L E, CREMERS D A. Effect of sampling geometry on elemental emissions in laser-induced breakdown spectroscopy [J]. Applied Spectroscopy 1996, 50(12).
[8] 孙承伟, 陆启生, 范正修. 激光辐照效应 [M]. 北京:国防工业出版社 2002.
