多晶硅薄膜制备技术的研究进展

  • 马蕾 ,
  • 简红彬 ,
  • 康建波 ,
  • 彭英才
展开
  • 河北大学,电子信息工程学院,河北,保定,071002

网络出版日期: 2005-01-25

基金资助

河北省自然科学基金

Progress on the Fabricated Technique of Poly-Si Films

  • MA Lei ,
  • JIAN Hong-bin ,
  • KANG Jian-bo ,
  • PENG Ying-cai
Expand

Online published: 2005-01-25

摘要

多晶硅薄膜是当前在能源科学和信息技术领域中广泛使用的功能材料,它兼具单晶硅和氢化非晶硅(a-Si:H)的优点.本文评论了近几年多晶硅薄膜制备技术的研究进展,着重讨论了每种方法薄膜的淀积机理,并预测了多晶硅薄膜制备技术的未来发展趋势.

本文引用格式

马蕾 , 简红彬 , 康建波 , 彭英才 . 多晶硅薄膜制备技术的研究进展[J]. 河北大学学报(自然科学版), 2005 , 25(1) : 97 -103 . DOI: 10.3969/j.issn.1000-1565.2005.01.023

参考文献

[1] 刘丰珍, 朱美芳, 冯勇, 刘金龙, 汪六九, 韩一琴. 等离子体-热丝CVD技术制备多晶硅薄膜 [J]. 半导体学报 2003.doi:10.3321/j.issn:0253-4177.2003.05.011
[2] 曾祥斌, JOHNNY K O Sin, 徐重阳, 饶瑞, 刘世建. 多晶硅薄膜晶体管的表面氮钝化技术 [J]. 压电与声光 2001.doi:10.3969/j.issn.1004-2474.2001.02.016
[3] 曾祥斌, 徐重阳, 饶瑞, JOHNNY K O Sin. 多晶硅薄膜的表面处理工艺 [J]. 无机材料学报 2001.doi:10.3321/j.issn:1000-324X.2001.04.020
[4] 陈城钊, 方健文, 林璇英. a-Si∶H 薄膜固相晶化法制备多晶硅薄膜 [J]. 浙江师范大学学报(自然科学版) 2002.doi:10.3969/j.issn.1001-5051.2002.03.009
[5] 邱法斌, 骆文生, 张玉, 刘传珍, 荆海, 黄锡珉. 准分子激光烧结玻璃衬底上多晶硅薄膜材料的制备 [J]. 液晶与显示 2001.doi:10.3969/j.issn.1007-2780.2001.03.002
[6] 刘传珍, 杨柏梁, 袁剑峰, 李牧菊, 吴渊, 寥燕平, 张玉, 王大海, 黄锡珉, LIU Chuan-zhen, YANG Bai-liang, YUAN Jian-feng, LI Mu-ju, WU Yuan, LIAO Yan-ping, ZHANG Yu, WANG Da-hai, HUANG Xi-min. 金属诱导法低温多晶硅薄膜的制备与研究 [J]. 半导体学报 2001.doi:10.3321/j.issn:0253-4177.2001.01.011
[7] 金仲和, 王跃林. MILC超薄沟道多晶硅薄膜晶体管 [J]. 电子学报 2001.doi:10.3321/j.issn:0372-2112.2001.08.016
[8] 王文, 孟志国. 低温金属诱导横向晶化多晶硅材料和器件技术 [J]. 电子学报 2003.doi:10.3321/j.issn:0372-2112.2003.05.006
[9] 秦明, 黄庆安, Yuen C Y, Poon Vincent M C. 金属诱导非晶硅横向晶化形成的多晶硅的生长研究 [J]. 固体电子学研究与进展 2001.doi:10.3969/j.issn.1000-3819.2001.03.018
[10] 黄创君, 林璇英, 林揆训, 余楚迎, 姚若河. 低温制备高质量多晶硅薄膜技术及其应用 [J]. 功能材料 2001.doi:10.3321/j.issn:1001-9731.2001.06.001
[11] Serge Ecoffey, Didier Bouvet, Adrian M Ionescu. Low-pressure chemical vapour deposition of nanograin polysilicon ultra-thin films [J]. Nanotechnology 2002, 3(3).
[12] Fortunato G.. POLYCRYSTALLINE SILICON THIN-FILM TRANSISTORS - A CONTINUOUS EVOLVING TECHNOLOGY [J]. Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films 1997, 1/2(1/2).
[13] M. Modreanu, N. Tomozeiu, Mariuca Gartner, P. Cosmin. Microstructural and optical properties of as-deposited LPCVD silicon films [J]. Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films 2001, 1/2(1/2).
[14] M. Modreanu, M. Bercu, C. Cobianu. Physical properties of polycrystalline silicon films related to LPCVD conditions [J]. Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films 2001, 1/2(1/2).
[15] Schropp REI., Stannowski B., Rath JK.. New challenges in thin film transistor (TFT) research [J]. Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites 2002, Pt.2(Pt.2).
[16] Sunayama H., Yamada K., Karasawa M., Ishibashi K.. Preparation of poly-Si films by Cat-CVD for thin film transistor [J]. Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films 2003, 1/2(1/2).
[17] Rogel R., Mohammed-Brahim T., Bonnaud O., Kleider JP., Sarret M.. High quality unhydrogenated low-pressure chemical vapor deposited polycrystalline silicon [J]. Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites 2000, Pt.A(Pt.A).
[18] Mohammed-Brahim T., Briand D., Sarret M., Bonnaud O., Kleider JP., Longeaud C., Lambert B., Kis-Sion K.. From amorphous to polycrystalline thin films: dependence on annealing time of structural and electronic properties [J]. Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites 1998, Pt.B(Pt.B).
[19] SONG IN-HYUK, HAN MIN-KPP. Low temperature poly-Si TFTs for display application [J]. Current Applied Physics 2003, 3.
[20] Veneri PD., Imparato A., Minarini C., Privato C., Terzini E., Addonizio ML.. Application of Nd : YLF laser to amorphous silicon crystallization process [J]. Materials Science & Engineering, B. Solid-State Materials for Advanced Technology 2000, 0(0).
[21] PIHAN E, SLAOUI A, ROCAI CABARROCAS P. Polycrystalline silicon films by aluminium-induced crystallization: growth process vs. silicon deposition method [J]. Thin Solid Films 2004, 451-452.
[22] L. Pereira, H. Aguas, R.M.S. Martins, P. Vilarinho, E. Fortunato, R. Martins. Polycrystalline silicon obtained by metal induced crystallization using different metals [J]. Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films 2004, 3(3).
[23] Xinxin Li, Yitshak Zohar, Man Wong. Fabrication and characterization of nickel-induced laterally crystallized polycrystalline silicon piezo-resistive sensors [J]. Sensors and Actuators, A. Physical 2000, 1/3(1/3).
[24] Jin ZH., Yeung M., Kwok HS., Wong M., Bhat GA.. Nickel induced crystallization of amorphous silicon thin films [J]. Journal of Applied Physics 1998, 1(1).
[25] Jin Zhonghe, Kwok Hoi S., Wong Man, Moulding Keith. Effects of extended heat treatment on Ni induced lateral crystallization of amorphous silicon thin films [J]. IEEE Transactions on Electron Devices 1999, 1(1).
文章导航

/

〈 〉