铁电薄膜及铁电存储器研究

  • 武德起 ,
  • 刘保亭 ,
  • 闫正 ,
  • 闫常瑜 ,
  • 赵庆勋
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  • 河北大学,物理科学与技术学院,河北,保定,071002

网络出版日期: 2005-01-25

基金资助

河北省自然科学基金,河北省科技攻关项目,河北大学校科研和校改项目,人事部留学回国人员科技活动择优基金

Ferroelectric Films and Ferroelectric Random Access Memory

  • WU De-qi ,
  • LIU Bao-ting ,
  • YAN Zheng ,
  • YAN Chang-yu ,
  • ZHAO Qing-xun
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Online published: 2005-01-25

摘要

综述了铁电薄膜以及铁电存储器的发展,讨论了铁电薄膜制备方法、结构和物理性能表征,并结合作者的前期工作,详细讨论了用于铁电薄膜与硅衬底集成的导电阻挡层问题,指出了铁电薄膜研究中需重点解决的一些问题.

本文引用格式

武德起 , 刘保亭 , 闫正 , 闫常瑜 , 赵庆勋 . 铁电薄膜及铁电存储器研究[J]. 河北大学学报(自然科学版), 2005 , 25(2) : 225 -230 . DOI: 10.3969/j.issn.1000-1565.2005.02.025

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