金刚石n型掺杂的研究进展

  • 韩佳宁 ,
  • 赵庆勋 ,
  • 辛红丽 ,
  • 文钦若
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  • 河北大学物理科学与技术学院,河北,保定,071002

网络出版日期: 2002-02-25

基金资助

河北省自然科学基金

Investigation of n- type Doping of Diamond

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Online published: 2002-02-25

摘要

对金刚石n型掺杂工艺中的施主元素的类型、机理、及所使用的基底材料和方法进行了综合评述,并对I族元素(Li,Na),V族元素(N,P),Ⅵ族元素(O,S)等施主元素掺杂后的性能进行了比较.分析表明:采用CVD法,掺入硫杂质应是较理想的掺杂方式.

关键词: 掺杂; n型半导体; 金刚石

本文引用格式

韩佳宁 , 赵庆勋 , 辛红丽 , 文钦若 . 金刚石n型掺杂的研究进展[J]. 河北大学学报(自然科学版), 2002 , 22(1) : 87 -91 . DOI: 10.3969/j.issn.1000-1565.2002.01.023

参考文献

[1] May PW.. Diamond thin films: a 21st-century material [J]. Philosophical transactions of the Royal Society. Mathematical, physical, and engineering sciences 2000, 1766(1766).
[2] Prins J F. Activation of boron-dopant atoms in ion-implanted diamond [J]. Physical Review B 1988, 38(08).
[3] Kiyota H, MATSUSHIMA E, SATO K. Electrical properties of B- doped homoepitaxial diamond (001) film [J]. Diamond and Related Materials 1997, 6(06).
[4] Xia Y, SEKIGUCHI T, Zhang W. Effects of hydrogen ion bombardment and boron doping on (001) polycrystalline diamond film [J]. Journal of Crystal Growth 2000, 213.
[5] Prins J F. Fermi- dirac statistics and the nature of the compensating donors in boron-doped diamond layers [J]. PHYSICAL REVIEW B 1988, 39(06).
[6] 刘恩科, 朱秉升. 半导体物理学 [M]. 上海:上海科学技术出版社 1984.
[7] Hasegawa M, TAKEUCHI D, YAMANAKA S. N- type control by Sulfur ion implantation in bomoepitaxial diamond films grown by chemical vapor deposition [J]. Japanese Journal of Applied Physics 1999, 38.
[8] D. Saada, Joan Adler, R. Kalish. Sulfur: A potential donor in diamond [J]. Applied physics letters 2000, 6(6).
[9] Saito T., Kusakabe K., Morooka S., Maeda H., Hayashi Y., Asano T., Kawahara A., Kameta M.. Morphology and semiconducting properties of homoepitaxially grown phosphorus-doped (1 0 0) and (1 1 1) diamond films by microwave plasma-assisted chemical vapor deposition using triethylphosphine as a dopant source [J]. Journal of Crystal Growth 1998, 4(4).
[10] STEMSCHULTE H, SCHRECK M, STRIZKER B. Control of Lithium-t-Butoxide addition during chemical vapor deposition of Li- doped diamond films by optical cmission spectroscopy [J]. Physica Status Solidi A 1999, 174.
[11] Prawer S, UZAN- SAVAY C, BRAUNSTEIN G. Can n- type doping of diamond be achieved by Li or Na ion implantation [J]. Applied Physics Letters 1993, 63(18).
[12] KAJIHARA S A, ANTONELLI A, BEMHOLE J. Nitrogen and potential n- type dopants in diamond [J]. Physical Review Letters 1990, 66(05).
[13] Koizumi S, TERAJI T, KANDA H. Phosphorus-doped chemical tapor deposition of diamond [J]. Diamond and Related Materials 2000, 9.
[14] Johan F. Prins. The nature of radiation damage in diamond: activation of oxygen donors [J]. Diamond and Related Materials 2000, 3-6(3-6).
[15] Sakaguchi I., Kikuchi Y., Yasu E., Haneda H., Suzuki T., Ando T., Gamo MN.. Sulfur: A donor dopant for n-type diamond semiconductors [J]. Physical Review.B.Condensed Matter 1999, 4(4).
[16] PR INS J F. N-type semiconducting diamond by means of oxygen-ion implantation [J]. PHYSICAL REVIEW B 1999, 61(11).
[17] 王季陶. 非平衡定态相图 [M]. 北京:科学出版社 2000.
[18] H. Sternschulte, M. Schreck, B. Stritzker, A. Bergmaier, G. Dollinger. Lithium addition during CVD diamond growth: influence on the optical emission of the plasma and properties of the films [J]. Diamond and Related Materials 2000, 3-6(3-6).
[19] J. Stiegler, A. Bergmaier, J.Michler, S. Laufer, G. Dollinger, E. Blank. The effect of nitrogen on low temperature growth of diamond films [J]. Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films 1999, 1/2(1/2).
[20] Shih C.F., Liu K.S.. Effect of nitrogen doping on the electron field emission properties of chemical vapor deposited diamond films [J]. Diamond and Related Materials 1999, 9-10(9-10).
[21] Koizumi S.. Growth and characterization of phosphorus doped n-type diamond thin films [J]. Physica Status Solidi, A. Applied Research 1999, 1(1).
[22] Nishimori T, Nakano K, Sakamoto H, Takakuwa Y, Kono S. N-type high-conductive epitaxial diamond film prepared by gas source molecular beam epitaxy with methane and tri-n-butylphosphine [J]. Applied physics letters 1997, 7(7).
[23] Okano K, KIYOTA H, IWASAKI T. Synthesis of n-type semiconducting diamond film using diphosphorus pentaoxide as the doping source [J]. Applied Physics A:Materials Science and Processing 1990, 51.
[24] Saito T, KAMETA M, KUSAKABE K. Synthesis and electrical properties of phosphorus-doped homoepitaxial diamond ( 111 ) by microwave plasma-assisted chemical vapor deposition using triethylphosphine as a dopant source [J]. Japanese Journal of Applied Physics 1998, 37(37).
[25] Cao G Z, GILING L J, ALKEMADE P F A. Growth of phosphorus and nitrogen co- doped diamond films [J]. Diamond and Related Materials 1995, 4.
[26] Kim HS., Lee SY., Lee JY., Kang JY., Shim KH.. High-quality epitaxial growth of in situ phosphorus-doped Si films by promoting dispersion of native oxides in alpha-Si [J]. Journal of Crystal Growth 2000, 3/4(3/4).
[27] HAENEN K, MEYKENS K, NESLADEK M. Temperature dependent spectroscopic study of the electronic structure of phosphorus in n- type CVD diamond films [J]. Diamond and Related Materials 2000, 9.
[28] BOHR S, HAUBNER R, Lux B. Influence of phosphorus addition on diamond CVD [J]. Diamond and Related Materials 1995, 4.
[29] E. Gheeraert, S. Koizumi, T. Teraji, H. Kanda, M. Nesladek. Electronic states of phosphorus in diamond [J]. Diamond and Related Materials 2000, 3-6(3-6).
[30] Jackson K, PEDERSON M R, HARRISON J G. Donor levels and impurity- atom relaxation in nitrogen and phosphorus-doped diamond [J]. Physical Review B 1990, 41(18).
[31] Cao GZ., Bauhuis GJ., Giling LJ., Alkemade PFA., Driessen FAJM.. HOMOEPITAXIAL DIAMOND FILMS CODOPED WITH PHOSPHORUS AND NITROGEN BY CHEMICAL-VAPOR DEPOSITION [J]. Journal of Applied Physics 1995, 5(5).
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