金刚石n型掺杂的研究进展

doi:10.3969/j.issn.1000-1565.2002.01.023

摘要/Abstract

摘要： 对金刚石n型掺杂工艺中的施主元素的类型、机理、及所使用的基底材料和方法进行了综合评述,并对I族元素(Li,Na),V族元素(N,P),Ⅵ族元素(O,S)等施主元素掺杂后的性能进行了比较.分析表明:采用CVD法,掺入硫杂质应是较理想的掺杂方式.

中图分类号:

O474

韩佳宁,赵庆勋,辛红丽,文钦若. 金刚石n型掺杂的研究进展[J]. 河北大学学报(自然科学版), 2002, 22(1): 87-91.

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金刚石n型掺杂的研究进展

Investigation of n- type Doping of Diamond

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