脉冲激光烧蚀沉积纳米Si膜动力学研究现状

张荣梅,王英龙

Progress of Dynamic Study for Silicon Nanoparticales Deposited by Pulsed Laser Ablation

河北大学学报(自然科学版) . 2003, (3): 329 -333 . DOI: 10.3969/j.issn.1000-1565.2003.03.023