Journal of Hebei University (Natural Science Edition) ›› 2006, Vol. 26 ›› Issue (4): 362-365,372.DOI: 10.3969/j.issn.1000-1565.2006.04.008

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Analysis of Photothermal Deflection Spectroscopy of SiNx Thin Films with Rough Surface

DING Wen-ge,ZHANG Jiang-yong,MA Li-bin,YU Wei,FU Guang-sheng   

  • Online:2006-07-25 Published:2006-07-25

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