Progress on the Fabricated Technique of Poly-Si Films

doi:10.3969/j.issn.1000-1565.2005.01.023

Abstract

CLC Number:

O484

MA Lei,JIAN Hong-bin,KANG Jian-bo,PENG Ying-cai. Progress on the Fabricated Technique of Poly-Si Films[J]. Journal of Hebei University (Natural Science Edition), 2005, 25(1): 97-103.

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Progress on the Fabricated Technique of Poly-Si Films

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