Influence of deposition pressure on optical and electrical properties of IGZO films fabricated by radio frequency magnetron sputtering
YAN Xiaobing,SHI Shoushan,LOU Jianzhong,ZHENG Shukai,CAO Zhi
Journal of Hebei University (Natural Science Edition) . 2015, (3): 243 -246,252 .  DOI: 10.3969/j.issn.1000-1565.2015.03.004