Influence of deposition pressure on optical and electrical properties of IGZO films fabricated by radio frequency magnetron sputtering

doi:10.3969/j.issn.1000-1565.2015.03.004

Abstract

CLC Number:

TB32

YAN Xiaobing,SHI Shoushan,LOU Jianzhong,ZHENG Shukai,CAO Zhi. Influence of deposition pressure on optical and electrical properties of IGZO films fabricated by radio frequency magnetron sputtering[J]. Journal of Hebei University (Natural Science Edition), 2015, 35(3): 243-246,252.

References

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