La0.67Sr0.33MnO3/PbZr0.4Ti0.6O3/La0.67Sr0.33MnO3外延铁电电容器物理性能

doi:10.3969/j.issn.1000-1565.2022.04.005

摘要/Abstract

摘要： 采用脉冲激光沉积法制备La_0.67Sr_0.33MnO₃(LSMO)薄膜,溶胶-凝胶法制备PbZr_0.4Ti_0.6O₃(PZT)薄膜,在SrTiO₃(STO)基片上制备了LSMO/PZT/LSMO异质结电容器.X线衍射(XRD)研究表明LSMO和PZT薄膜在STO基片上实现了外延生长.LSMO/PZT/LSMO电容器具有良好的铁电性能,在5 V测试电压下,剩余极化强度为26.9 μC/cm²,矫顽电压为2.5 V,LSMO/PZT/LSMO电容器显示出了良好的抗疲劳性能.5 V电压下电容器的漏电流密度为7.4×10^-6 A/cm²,在0~2.9 V为欧姆导电机制,2.9~5 V满足空间电荷限制电流(SCLC)导电机制.

关键词: 铁电电容器, 锆钛酸铅, 镧锶锰氧, 脉冲激光沉积法, 溶胶-凝胶法, 漏电机理

Abstract: La_0.67Sr_0.33MnO₃(LSMO)/PbZr_0.4Ti_0.6O₃(PZT)/LSMO heterostructure was prepared on SrTiO₃(STO)substrate, in which LSMO films were prepared by pulsed laser deposition and PZT film was prepared by Sol-Gel method. The LSMO/PZT/LSMO heterostructure was characterized in terms of its structural and physical properties. X-ray diffraction(XRD)analysis established that both LSMO and PZT were grown epitaxially on STO substrate. The LSMO/PZT/LSMO capacitor possessed very good ferroelectric hysteresis property and its remnent polarization and coercive voltage of the LSMO/PZT/LSMO capacitor, measured at 5 V, were 26.9 μC/cm² and 2.5 V, respectively. The LSMO/PZT/LSMO capacitor exhibited very good fatigue resistant property. The leakage current density of the capacitor measured at 5 V was 7.4×10^-6 A/cm², and it met the ohmic conduction mechanism below 2.9 V, and space charge limited current(SCLC)conduction from 2.9 V to 5 V.- DOI:10.3969/j.issn.1000-1565.2022.04.005La_0.67Sr_0.33MnO₃/PbZr_0.4Ti_0.6O₃/La_0.67Sr_0.33MnO₃外延铁电电容器物理性能薛迎港¹,孟浩¹,王照文¹,赵文泽²,刘保亭¹,代秀红¹(1.河北大学物理科学与技术学院,河北保定 071002;2.河北大学电子信息工程学院,河北保定 071002)摘要:采用脉冲激光沉积法制备La_0.67Sr_0.33MnO₃(LSMO)薄膜,溶胶-凝胶法制备PbZr_0.4Ti_0.6O₃(PZT)薄膜,在SrTiO₃(STO)基片上制备了LSMO/PZT/LSMO异质结电容器.X线衍射(XRD)研究表明LSMO和PZT薄膜在STO基片上实现了外延生长.LSMO/PZT/LSMO电容器具有良好的铁电性能,在5 V测试电压下,剩余极化强度为26.9 μC/cm²,矫顽电压为2.5 V,LSMO/PZT/LSMO电容器显示出了良好的抗疲劳性能.5 V电压下电容器的漏电流密度为7.4×10^-6 A/cm²,在0~2.9 V为欧姆导电机制,2.9~5 V满足空间电荷限制电流(SCLC)导电机制. 关键词:铁电电容器;锆钛酸铅;镧锶锰氧;脉冲激光沉积法;溶胶-凝胶法;漏电机理中图分类号:O469 文献标志码:A 文章编号:1000-1565(2022)04-0364-06Physical properties of La_0.67Sr_0.33MnO₃/PbZr_0.4Ti_0.6O₃/La_0.67Sr_0.33MnO₃ epitaxial ferroelectric capacitorXUE Yinggang¹,MENG Hao¹,WANG Zhaowen¹,ZHAO Wenze²,LIU Baoting¹,DAI Xiuhong¹(1. College of Physics Science and Technology, Hebei University, Baoding 071002, China;2. College of Electronic and Information Engineering, Hebei University, Baoding 071002, China)Abstract: La_0.67Sr_0.33MnO₃(LSMO)/PbZr_0.4Ti_0.6O₃(PZT)/LSMO heterostructure was prepared on SrTiO₃(STO)substrate, in which LSMO films were prepared by pulsed laser deposition and PZT film was prepared by Sol-Gel method. The LSMO/PZT/LSMO heterostructure was characterized in terms of its structural and physical properties. X-ray diffraction(XRD)analysis established that both LSMO and PZT were grown epitaxially on STO substrate. The LSMO/PZT/LSMO capacitor possessed very good ferroelectric hysteresis property and its remnent polarization and coercive voltage of the LSMO/PZT/LSMO capacitor, measured at 5 V, were 26.9 μC/cm² and 2.5 V, respectively. The LSMO/PZT/LSMO capacitor exhibited very good fatigue resistant property. The leakage current density of the capacitor measured at 5 V was 7.4×10^-6 A/cm², and it met the ohmic conduction mechanism below 2.9 V, and space charge limited current(SCLC)conduction from 2.9 V to 5 V.- 收稿日期:2021-08-31 基金项目:国家自然科学基金资助项目(11374086);河北省自然科学基金资助项目(E2014201188;A2018201168) 第一作者:薛迎港(1997—),男,河北石家庄人,河北大学在读硕士研究生,主要从事铁电薄膜及器件方向研究.E-mail:yinggang_xue@hotmail.com 通信作者:代秀红(1978—)女,河北定州人,河北大学副教授,主要从事钙钛矿结构超导、铁电、介电等氧化物薄膜及器件方向研究.E-mail:daixiuhong@hbu.edu.cn第4期薛迎港等:La_0.67Sr_0.33MnO₃/PbZr_0.4Ti_0.6O₃/La_0.67Sr_0.33MnO₃外延铁电电容器物理性能

Key words: ferroelectric capacitor, PbZr_0.4Ti_0.6O₃, La_0.67Sr_0.33MnO₃, pulsed laser deposition, sol-gel, leakage mechanism

中图分类号:

O469

薛迎港,孟浩,王照文,赵文泽,刘保亭,代秀红. La_0.67Sr_0.33MnO₃/PbZr_0.4Ti_0.6O₃/La_0.67Sr_0.33MnO₃外延铁电电容器物理性能[J]. 河北大学学报(自然科学版), 2022, 42(4): 364-369.

XUE Yinggang,MENG Hao,WANG Zhaowen,ZHAO Wenze,LIU Baoting,DAI Xiuhong. Physical properties of La_0.67Sr_0.33MnO₃/PbZr_0.4Ti_0.6O₃/La_0.67Sr_0.33 MnO₃ epitaxial ferroelectric capacitor[J]. Journal of Hebei University(Natural Science Edition), 2022, 42(4): 364-369.

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La_0.67Sr_0.33MnO₃/PbZr_0.4Ti_0.6O₃/La_0.67Sr_0.33MnO₃外延铁电电容器物理性能

Physical properties of La_0.67Sr_0.33MnO₃/PbZr_0.4Ti_0.6O₃/La_0.67Sr_0.33 MnO₃ epitaxial ferroelectric capacitor

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