氩/氦氩混合气体对大气压针-板DBD光电特性的影响

doi:10.3969/j.issn.1000-1565.2026.03.005

摘要/Abstract

摘要： 在介质阻挡放电(dielectric barrier discharge, DBD)中,工作气体改变会导致放电产生的等离子体光电特性随之变化.本文采用大气压针-板DBD装置,系统研究了氩气和氦氩混合气体对等离子体光电特性的影响.实验结果表明:当采用氩气作为工作气体时,针-板DBD表现出更高的放电强度,放电通道的发光强度更高.在相同外加电压下,氩气条件下的放电峰值电流显著高于氦氩混合气体条件下的放电峰值电流.同时,氩气放电的外加功率和分子转动温度均略高于混合气体,因而更适用于刻蚀等有高能放电需求的工业应用.相比之下,在氦氩混合气体条件下,放电形态更为均匀,分子振动温度较高,而分子转动温度相对较低,表明其更适合于材料表面改性等对温度敏感的工业应用.

关键词: 介质阻挡放电, 外加功率, 分子振动温度, 分子转动温度

Abstract: In the dielectric barrier discharge(DBD), changes in the working gas lead to corresponding variations in the optical and electrical characteristics of the plasma. This study systematically investigates the effects of Ar gas and He-Ar gas mixture on the optical and electrical characteristics of plasma using an atmospheric-pressure needle-plate DBD device. Experimental results indicate that when the Ar gas is used as the working gas, the needle-plate DBD exhibits higher discharge intensities and brighter discharge images.- 引用格式:张文恺,杨术明,马永龙,等.基于EDEM的牧场推料机器人参数优化设计与试验［J］.河北大学学报(自然科学版),2026,46(3):225-236.引用格式:侯佳讯,樊智慧,单瑞康,等.氩/氦氩混合气体对大气压针-板DBD光电特性的影响［J］.河北大学学报(自然科学版),2026,46(3):271-277.DOI:10.3969/j.issn.1000-1565.2026.03.005氩/氦氩混合气体对大气压针-板DBD光电特性的影响侯佳讯,樊智慧,单瑞康,王伟伟,刘峰(河北工程大学数理科学与工程学院,河北省计算光学成像与光电检测技术创新中心,河北省计算光学成像与智能感测国际联合研究中心,河北邯郸 056038)摘要:在介质阻挡放电(dielectric barrier discharge, DBD)中,工作气体改变会导致放电产生的等离子体光电特性随之变化.本文采用大气压针-板DBD装置,系统研究了氩气和氦氩混合气体对等离子体光电特性的影响.实验结果表明:当采用氩气作为工作气体时,针-板DBD表现出更高的放电强度,放电通道的发光强度更高.在相同外加电压下,氩气条件下的放电峰值电流显著高于氦氩混合气体条件下的放电峰值电流.同时,氩气放电的外加功率和分子转动温度均略高于混合气体,因而更适用于刻蚀等有高能放电需求的工业应用.相比之下,在氦氩混合气体条件下,放电形态更为均匀,分子振动温度较高,而分子转动温度相对较低,表明其更适合于材料表面改性等对温度敏感的工业应用.关键词:介质阻挡放电;外加功率;分子振动温度;分子转动温度中图分类号:O461.2;O433.4 文献标志码:A 文章编号:1000-1565(2026)03-0271-07DOI:10.3969/j.issn.1000-1565.2026.03.005Effect of Ar gas and He-Ar gas mixture on the optical and electrical characteristics of a needle-plate DBD at atmospheric pressureHOU Jiaxun, FAN Zhihui, SHAN Ruikang, WANG Weiwei, LIU Feng(Hebei Computational Optical Imaging and Photoelectric Detection Technology Innovation Center, Hebei International Joint Research Center for Computational Optical Imaging and Intelligent Sensing, School of Mathematics and Physics, Hebei University of Engineering, Handan 056038, China)Abstract: In the dielectric barrier discharge(DBD), changes in the working gas lead to corresponding variations in the optical and electrical characteristics of the plasma. This study systematically investigates the effects of Ar gas and He-Ar gas mixture on the optical and electrical characteristics of plasma using an atmospheric-pressure needle-plate DBD device. Experimental results indicate that when the Ar gas is used as the working gas, the needle-plate DBD exhibits higher discharge intensities and brighter discharge images.- 收稿日期:2025-10-16;修回日期:2025-12-03 基金项目:国家自然科学基金项目(11505045);河北省自然科学基金项目(A2012402002);邯郸市科学技术研究与发展计划项目(21422111227) 第一作者:侯佳讯(2001—),男,河北工程大学在读硕士研究生,主要从事等离子体放电特性方向研究.E-mail:859524939@qq.com 通信作者:王伟伟(1979— ),女,河北工程大学副教授,主要从事等离子体及其应用方向研究. E-mail:wangweiwei@hebeu.edu.cn 第3期侯佳讯等:氩/氦氩混合气体对大气压针-板DBD光电特性的影响河北大学学报(自然科学版) 第46卷At the same applied voltage, the peak current of discharge under the Ar gas condition is significantly higher than that under the He-Ar gas mixture condition. Meanwhile, the applied power and molecular rotational temperature in the Ar gas are slightly higher than those in the He-Ar gas mixture, making it more suitable for industrial applications requiring high-energy discharges, such as etching. In contrast, under the He-Ar gas mixture condition, the discharge exhibits the more uniform morphology, with the higher molecular vibrational temperature and the relatively lower rotational temperature, indicating that this configuration is more appropriate for temperature-sensitive industrial processes, such as material surface modification.

Key words: dielectric barrier discharge, applied power, molecular vibrational temperature, molecular rotational temperature

中图分类号:

侯佳讯,樊智慧,单瑞康,王伟伟,刘峰. 氩/氦氩混合气体对大气压针-板DBD光电特性的影响[J]. 河北大学学报(自然科学版), 2026, 46(3): 271-277.

HOU Jiaxun, FAN Zhihui, SHAN Ruikang, WANG Weiwei, LIU Feng. Effect of Ar gas and He-Ar gas mixture on the optical and electrical characteristics of a needle-plate DBD at atmospheric pressure[J]. Journal of Hebei University(Natural Science Edition), 2026, 46(3): 271-277.

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