Journal of Hebei University (Natural Science Edition) ›› 2020, Vol. 40 ›› Issue (2): 132-136.DOI: 10.3969/j.issn.1000-1565.2020.02.004

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Simulation and analysis of pressure membrane of MEMS fiber optic pressure sensor

ZHU Yan1,2,PAN Yatao1,LIU Guanghui3,LI Xiaoting1   

  1. 1.College of Quality and Technical Supervision, Hebei University, Baoding 071002, China; 2.College of Physics Science and Technology, Hebei University, Baoding 071002, China; 3.Department of Highway Equipment Maintenance of Transportation Bureau of Hebei Province, Baoding 071000, China
  • Received:2019-01-01 Online:2020-03-25 Published:2020-03-25

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Abstract: The working principle of a reflective intensity modulated MEMS fiber pressure sensor is described using circular thin film with fixed circumference.Based on the existing formulas of membrane stress,strain and natural frequency under external pressure,a general law of the change of the diaphragm with the sensor scale is derived.The simulation and analysis of the deduced law by using the finite element analysis software ANSYS verify the correctness and universality of the law.At the same time,the analysis model is revised,and the relation and difference between theoretical formula and practical application are summarized.

Key words: circular diaphragm, fiber optic pressure sensor, finite element analysis, modified model

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