Numerical Simulations of Particle Distributions for Sulfur Doped n-type Diamond Thin Film in the Mixture of H2/CH4/H2S/Ar

doi:10.3969/j.issn.1000-1565.2005.04.008

Abstract

CLC Number:

NAN Jing-yu,ZHAO Qing-xun,QIAO Xiao-dong,YAN Zheng,LIU Bao-ting,ZHANG Jing. Numerical Simulations of Particle Distributions for Sulfur Doped n-type Diamond Thin Film in the Mixture of H2/CH4/H2S/Ar[J]. Journal of Hebei University (Natural Science Edition), 2005, 25(4): 369-372,398.

References

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