河北大学学报(自然科学版) ›› 2017, Vol. 37 ›› Issue (6): 572-576.DOI: 10.3969/j.issn.1000-1565.2017.06.003

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脉冲激光烧蚀制备纳米硅晶粒过程中稳定晶核大小研究

秦爱丽1,2,褚立志1,邓泽超1,丁学成1,王英龙1   

  • 收稿日期:2017-06-16 发布日期:2017-11-25
  • 通讯作者: 王英龙(1965—),男,河北定州人,河北大学教授,博士生导师,主要从事激光与物质相互作用等方面的研究.E-mail:hdwangyl@hbu.edu.cn
  • 作者简介:秦爱丽(1977—),女,河北内丘人,河北大学在读博士研究生. E-mail:50171642@qq.com
  • 基金资助:
    河北省自然科学基金资助项目(A2015201166);邯郸市自然科学基金资助项目(1521109072-3)

Stable nucleus size of silicon nanoparticles prepared by pulsed-laser deposition

QIN Aili1,2,CHU Lizhi1,DENG Zechao1,DING Xuecheng1,WANG Yinglong1   

  1. 1.College of Physics Science and Technology, Hebei University, Baoding 071002, China; 2.College of Mathematics and Physics Science Engineering, Hebei University of Engineering, Handan 056038, China
  • Received:2017-06-16 Published:2017-11-25

摘要: 采用蒙特卡罗方法,模拟了脉冲激光烧蚀制备纳米硅晶粒的动力学过程.在模拟中采用了成核长大模型,对室温下的硅晶粒成核过程中稳定晶核所含硅原子数目进行了研究.经过大量的计算以及与实验数据的比较,发现当稳定晶核所含硅原子数目为6时,计算得出的纳米硅晶粒平均尺寸分布规律与实验数据符合较好.

关键词: 蒙特卡罗模拟, 成核生长过程, 稳定晶核

Abstract: The dynamical process of silicon nanoparticles prepared by pulsed-laser deposition was simulated using Monte Carlo simulation method.In the simulation,the nucleation and growth model was adopted and the number of silicon atoms contained in the stable nucleus were studied during nanoparticles formation at room temperature.After extensive calculations and comparisons with the experimental data,it was found that the average size distribution of silicon nanoparticles was in good agreement with the experimental data when the number of silicon atoms in the stable nucleus was 6.

Key words: Monte Carlo simulation, nucleation and growth process, stable nucleus

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