Device for surface treatment by plasma

doi:10.3969/j.issn.1000-1565.2016.04.005

Abstract

Abstract: A new-type of device that use dielectric barrier diasharge to generate plasma for surface treatment is designed.It is driven by an ac alternating(urrent)power supply,and a large number of plasma is produced due to four or even more times diasharge per half cycle of the driven voltage.In addition,the device generats plasma at the place that is close to the materials which need to be processed and has a high use ratio of plasma,thus showing great promise in industrial application.

Key words: dielectric barrier discharge, plasma, surface treatment

CLC Number:

O461

ZHANG Hao,DONG Lifang,WANG Hao,GAO Xing. Device for surface treatment by plasma[J]. Journal of Hebei University (Natural Science Edition), 2016, 36(4): 358-361.

References

[1] 詹华茂,李成榕,许金豹,等.用于材料表面处理的空气中的均匀介质阻挡放电[J].高电压技术,2008,34(3):508-511.DOI:10.13336/j.1003-6520.hve.2008.03.036. ZHANG H M,LI C R,XU J B,et al.Homogeneous dielectric barrier discharge in air for surface treatment of materials[J].High Voltage Engineering,2008,34(3):508-511.DOI:10.13336/j.1003-6520.hve.2008.03.036.
[2] 郑立允,熊惟皓,肖建华,等.刀具材料表面处理的研究现状[J].金属热处理,2005,30(6):31-35.DOI:10.13251/j.issn.0254-6051.2005.06.011. ZHENG L Y,XIONG W H,XIAO J H,et al.Research status of the surface treatment in tool materials[J].Heat Treatment of Metals,2005,30(6):31-35.DOI:10.13251/j.issn.0254-6051.2005.06.011.
[3] 李明娟,刘伟波.高能束金属材料表面处理技术的物理机制及应用[J].热加工工艺,2015,44(14):37-39.DOI:10.14158/j.cnki.1001-3814.2015.14.009. LI M J,LIU W B.Physics mechanisms and application of high-energy beam surface treatment technology in metallic materals[J].Hot Working Technology,2015,44(14):37-39.DOI:10.14158/j.cnki.1001-3814.2015.14.009.
[4] 王云英,孟江燕,陈学斌,等.复合材料用碳纤维的表面处理[J].表面技术,2007,36(3):53-57. WANG Y Y,MENG J Y,CHEN X B, et al.Surface treatment of carbon fiber for composites[J].Surface Technology,2007,36(3):53-57.
[5] XU X J.Dielectric barrier discharge - properties and applications[J].Thin Solid Films,2001,390(12):237-242.
[6] CALLEGARI T,BERNECKER B,BOEUF J P.Pattern formation and dynamics of plasma filaments in dielectric barrier discharges[J].Plasma Sources Sci Technol,2014,23(4):631-644.DOI:10.1088/0963-0252/23/5/054003.
[7] 韩育宏,贾鹏英,鲍文婷,等.微间隙大气压空气介质阻挡放电模式的转化[J].高电压技术,2015,41(2):572-577.DOI:10.13336/j.1003-6520.hve.2015.02.033. HAN Y H,JIA P Y,BAO W T,et al.Discharge mode transition of dielectric barrier discharge in micro-size air gap at atmospheric pressure[J].High Voltage Engineering,2015,41(2):572-577.DOI:10.13336/j.1003-6520.hve.2015.02.033.
[8] 聂万胜,程玉峰,车学科.介质阻挡放电等离子体流动控制研究进展[J].力学进展,2012,42(6):722-734. NIE W S,CHENG Y F,CHE X K.A review on dielectric on dielectric barrier discharge plasma flow control[J].Advance In Mechanics,2012,42(6):722-734.
[9] 王新新.介质阻挡放电及其应用[J].高电压技术,2009,35(1):1-11.DOI:10.13336/j.1003-6520.hve.2009.01.011. WANG X X.Dielectric barrier discharge and its application[J].High Voltage Engineering,2009,35(1):1-11.DOI:10.13336/j.1003-6520.hve.2009.01.011.
[10] 张浩,胡轶,董丽芳,等.介质阻挡放电中狭缝边界内放电特性[J].河北大学学报(自然科学版),2015,35(5):459-462.DOI:10.3969/j.issn.1000-1565.2015.05.003. ZHANG H,HU Y,DONG L F,et al.Discharge character in slit boundary in dielectric barrier discharge system[J].Journal of Hebei University(Natural Science),2015,35(5):459-462.DOI:10.3969/j.issn.1000-1565.2015.05.003.

[1]	CAI Zhimin,ZHANG Ning,ZHANG Shunxin,WANG Shuo,LIU Fucheng,HE Yafeng. Charge of dielectric particle deep into the plasma sheath in DC discharge [J]. Journal of Hebei University(Natural Science Edition), 2023, 43(5): 470-475.
[2]	HAN Guoxin,WU Jiacun,JIA Hanxiao,WANG Xuefang,JIA Pengying. Discharge characteristics of a linear-field brush-shaped plasma plume and surface modification of polymer [J]. Journal of Hebei University(Natural Science Edition), 2023, 43(4): 369-378.
[3]	ZHANG Shunxin, WANG Shuo, ZHANG Ning, CAI Yawen, HE Yafeng. Distribution of dusty plasma particles on an asymmetrical electrode [J]. Journal of Hebei University(Natural Science Edition), 2023, 43(2): 133-138.
[4]	ZHANG Wenxin, WANG Weiwei, LIU Feng, FAN Zhihui, WANG Jingquan, ZHANG Jinan. Optical and electrical characteristics of a pin-to-plate dielectric barrier discharge [J]. Journal of Hebei University(Natural Science Edition), 2023, 43(1): 35-39.
[5]	XU Huimin, TANG Xiao, WU Jiacun, CHEN Junyu, ZHAO Na, JIA Pengying. Atomic oxygen concentration of an atmospheric pressure plasma jet investigated by actinometry [J]. Journal of Hebei University(Natural Science Edition), 2022, 42(6): 599-604.
[6]	YIN Xianda, LIU Min, YANG Chaoshang, ZHANG Tiejun, WANG Qian. Breeding of fine strains of Auricularia auriculata based on MPMS method [J]. Journal of Hebei University(Natural Science Edition), 2022, 42(6): 650-656.
[7]	WANG Yue, PAN Yuyang, LI Yaohua, LI Caixia, ZHAO Wei,FU Shaoduo. Pattern of hexagon with line in dielectric barrier discharge [J]. Journal of Hebei University(Natural Science Edition), 2022, 42(2): 144-149.
[8]	YIN Zengqian, WU Lijiao. Discharge characteristics of argon plasma plume from solid to hollow [J]. Journal of Hebei University(Natural Science Edition), 2021, 41(6): 654-660.
[9]	GUO Zhiqiang, SUN Wentao, CAI Yawen, ZHANG Ning, ZHANG Shunxin, HE Yafeng. Measurement of electric charge of dielectric particles moving on plate in plasma [J]. Journal of Hebei University(Natural Science Edition), 2021, 41(6): 661-665.
[10]	LI Xuechen, CHEN Junyu, JIA Pengying, WU Jiacun, RAN Junxia. Influence of voltage parameters on the morphology of plasma plume in atmospheric pressure plasma jet [J]. Journal of Hebei University(Natural Science Edition), 2021, 41(5): 495-502.
[11]	SONG Caihong, WU Jiacun, WU Kaiyue, JIA Pengying, RAN Junxia, YANG Lijun. Discharge characteristics of a planar argon plasma plume generated by a quadri-electrode discharge device [J]. Journal of Hebei University(Natural Science Edition), 2021, 41(3): 251-257.
[12]	ZHOU Zhixiang, GUO Xue, LIU Fucheng, WANG Xiaofei. Effects of electrode curvature on the nonlinear behaviors of dielectric barrier discharge in cylindrical geometry [J]. Journal of Hebei University(Natural Science Edition), 2021, 41(3): 258-264.
[13]	ZHANG Miao, ZHANG Lianshui. Excited dissociation analysis of H₂S by pulse plasma streamer discharge [J]. Journal of Hebei University(Natural Science Edition), 2021, 41(2): 133-139.
[14]	WANG Zhaoyang,XU Hongzhi,LI Caixia,GUO Liting,YU Guanglin. Square superlattice pattern of dielectric barrier discharge gap with modulation effect [J]. Journal of Hebei University(Natural Science Edition), 2021, 41(2): 140-146.
[15]	JIA Qunpeng, MA Zhiling, HAN Bing, CHEN Chunxia, ZHANG Jixuan. Effects on SPR of Au/TiO₂ by preparation methods [J]. Journal of Hebei University (Natural Science Edition), 2020, 40(4): 385-391.