热退火条件下球状纳米硅晶粒成核势垒阈值研究

doi:10.3969/j.issn.1000-1565.2017.05.005

河北大学学报(自然科学版) ›› 2017, Vol. 37 ›› Issue (5): 471-475.DOI: 10.3969/j.issn.1000-1565.2017.05.005

热退火条件下球状纳米硅晶粒成核势垒阈值研究

邓泽超,付念,褚立志,丁学成,傅广生,王英龙

收稿日期:2017-01-10 出版日期:2017-09-25 发布日期:2017-09-25
通讯作者: 王英龙(1965—),男,河北定州人,河北大学教授,博士, 主要从事纳米材料方面的研究. E-mail:hdwangyl@hbu.cn
作者简介:邓泽超(1978—),男,河北廊坊人,河北大学讲师,河北大学在读博士研究生,主要从事纳米材料方面的研究. E-mail:dengzechao@hbu. cn
基金资助:
河北省自然科学基金资助项目(A2015201166;E2017201209);河北省研究生创新资助项目(CXZZBS2017024);河北省高等学校科学技术研究青年基金项目(QN2017017)

Threshold of nucleation barrier of spherical Si nanoparticle prepared by heat annealing

DENG Zechao, FU Nian,CHU Lizhi, DING Xuecheng, FU Guangsheng, WANG Yinglong

Key Laboratory of Photo-Electronics Information Materials of Hebei Province, College of Physics Science and Technology, Hebei University, Baoding 071002, China

Received:2017-01-10 Online:2017-09-25 Published:2017-09-25

摘要/Abstract

摘要： 利用纳秒脉冲激光烧蚀(PLA)技术,在室温、真空环境中沉积制备了非晶Si薄膜,并通过热退火实现了薄膜样品的晶化. 利用扫描电子显微镜(SEM)、X线衍射(XRD)仪和Raman散射(Raman)仪等技术对退火后的样品进行形貌表征和晶态成分分析,确定了非晶Si薄膜晶化的热退火阈值温度以及在该条件下所形成球状纳米Si晶粒的平均直径,结果分别为850 ℃和15 nm. 假定纳米Si晶粒为理想球体,结合固相晶化过程中的能量变化,计算得到了晶化形成直径15 nm球状晶粒所需要的能量,即成核势垒阈值,量级约为10^-11 mJ.

关键词: 脉冲激光烧蚀, 热退火, 纳米晶粒, 成核势垒

Abstract: Amorphous Si films were prepared by pulsed laser ablation in vacuum at room temperature. These samples were heated by annealing furnace in order to transform into crystalline film. Threshold of nucleation barrier and mean diameter of Si nanoparticle were determined through the results of SEM, Raman and XRD, which were 850 ℃ and 15 nm, respectively. If the shape of nanoparticle is assumed to be ideal sphere, we can obtain the magnitude of threshold nucleation barrier for the nanoparticle through calculation, which is in the order of 10^-11 mJ.

Key words: pulsed laser ablation, heat annealing, nanoparticle, nucleation barrier

中图分类号:

TN304

邓泽超,付念,褚立志,丁学成,傅广生,王英龙. 热退火条件下球状纳米硅晶粒成核势垒阈值研究[J]. 河北大学学报(自然科学版), 2017, 37(5): 471-475.

DENG Zechao, FU Nian,CHU Lizhi, DING Xuecheng, FU Guangsheng, WANG Yinglong. Threshold of nucleation barrier of spherical Si nanoparticle prepared by heat annealing[J]. Journal of Hebei University (Natural Science Edition), 2017, 37(5): 471-475.

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热退火条件下球状纳米硅晶粒成核势垒阈值研究

Threshold of nucleation barrier of spherical Si nanoparticle prepared by heat annealing

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